200 Maintenance

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HT12100-X001-E0 HT12100-X001-E0 2000/03/22

WAFER DICING MACHINE A-WD-200T
MAINTENANCE MANUAL

Keep this carefully for regular use.

MAINTENANCE MANUAL Contents

 A-WD-200T

 Contents

Introduction1

Range of Product Warrantee and Liability

2

Definition of Intended Manual Reader

6

Chapter 1 Safety
1-1 Before Using A-WD-200T ........................................................................ 1-1 1-2 WARNING, DANGER and CAUTION in this Manual............................... 1-2
1-2-1 Hazard level ................................................................................................................... 1-2 1-2-2 Symbols.......................................................................................................................... 1-4

1-3 Hazard Warning Label ............................................................................. 1-5
1-3-1 Hazard warning label types............................................................................................ 1-6 1-3-2 Locations of hazard warning labels................................................................................ 1-7

Contents-1

 A-WD-200T

 Contents

1-4 Safety Countermeasures....................................................................... 1-12
1-4-1 Safety precautions........................................................................................................ 1-12 1-4-2 Safety interlock system ................................................................................................ 1-14 1-4-3 Lockout / tagout............................................................................................................ 1-17 1-4-4 Protective equipment ................................................................................................... 1-21

1-5 Emergency ............................................................................................. 1-22
1-5-1 Emergency machine off switch (EMO)......................................................................... 1-22 1-5-2 Emergency countermeasure ........................................................................................ 1-27

1-6 A-WD-200T Hazardous Locations......................................................... 1-31
1-6-1 Hazardous driving sections .......................................................................................... 1-31 1-6-2 High voltage hazardous sections ................................................................................. 1-34 1-6-3 Hazardous highly heated sections ............................................................................... 1-35

Chapter 2 Configuration and Calibration
2-1 Appearance and Parts ............................................................................. 2-2
2-1-1 Front View ...................................................................................................................... 2-2 2-1-2 Left View......................................................................................................................... 2-3 2-1-3 Right View ...................................................................................................................... 2-4 2-1-4 Back View....................................................................................................................... 2-5 2-1-5 Top View......................................................................................................................... 2-6

2-2 Main Features........................................................................................... 2-7
2-2-1 Main body....................................................................................................................... 2-7 2-2-2 Spinner Cleaning Unit .................................................................................................. 2-16

Contents-2

 A-WD-200T

 Contents

2-2-3 Loader Unit................................................................................................................... 2-17 2-2-4 Control System............................................................................................................. 2-20 2-2-5 Other Units ................................................................................................................... 2-20 2-2-6 Special Options ............................................................................................................ 2-24

2-3 Calibration Preparation ......................................................................... 2-25
2-3-1 Exterior Panel............................................................................................................... 2-25 2-3-2 Release Cover Interlock............................................................................................... 2-29

2-4 Maintenance ........................................................................................... 2-30
2-4-1 X-axis ........................................................................................................................... 2-30 2-4-2 Y-axis ........................................................................................................................... 2-32 2-4-3 Z-axis............................................................................................................................ 2-34 2-4-4 Theta Axis .................................................................................................................... 2-35 2-4-5 Spindle ......................................................................................................................... 2-36 2-4-6 Flange Cover................................................................................................................ 2-40 2-4-7 Optical Cutter Set ......................................................................................................... 2-43 2-4-8 Spinner ......................................................................................................................... 2-44 2-4-9 Revolving Arm .............................................................................................................. 2-47 2-4-10 Elevator ...................................................................................................................... 2-52 2-4-11 Cassette ..................................................................................................................... 2-55 2-4-12 Calibration .................................................................................................................. 2-61

Chapter 3 Periodic Maintenance Service List
3-1 Periodical Maintenance ................................................................................ 3-1 3-2 Recommended Periodical Maintenance List .................................................. 3-2

Contents-3

 A-WD-200T

 Contents

Chapter 4 Maintenance And Check List
.................................................................................................................. ................................................................ 4-1 Daily Check List .................................................................................................................. 4-1
4-1-1 Verify Air Pressure.......................................................................................................... 4-1 4-1-2 Verify Cooling, Cutting And Cleaning Water Flow.......................................................... 4-2 4-1-3 Water leakage around the Machine ............................................................................... 4-3 4-1-4 Cleaning the X Axis Bellows .......................................................................................... 4-4

.............................................................................................................. ................................................................ 4-2 Weekly Check List .............................................................................................................. 4-5
4-2-1 Verify the Nozzles........................................................................................................... 4-5 Spinner Table Check.............................................................................................................. 4-7 4-2-3 Cutting Table rotation center check................................................................................ 4-8 4-2-4 Cleaning Oil Pan .......................................................................................................... 4-10

........................................................................................................... 4-3 Monthly Check List........................................................................................................... 4-11 List ................................................................................................
4-3-1 Focus.............................................................................................................................4-11 4-3-2 Revolving Arm Precision .............................................................................................. 4-12 4-3-3 Flange surface thrust direction runout.......................................................................... 4-13 4-3-4 Water Leakage from the Machine ................................................................................ 4-14 4-3-5 Cleaning the Tables...................................................................................................... 4-15 4-3-6 Wafer Table Planarity Measurement ......................................................................... 4-16 4-3-7 Y Axis Feed Precision .................................................................................................. 4-17 4-3-8 Frame Vacuum Pad...................................................................................................... 4-18

........................................................................................................ ................................................................ 4-4 3 Months Check List ........................................................................................................ 4-19
4-4-1 Y Axis Linear Scale Lissajou Wave.............................................................................. 4-19 4-4-2 Cleaning X Axis Guide Area......................................................................................... 4-20 4-4-3 Camera Magnification Offset........................................................................................ 4-21

Contents-4

 A-WD-200T

 Contents

........................................................................................................ ................................................................ 4-5 6 Months Check List ........................................................................................................ 4-22
4-5-1 Current Leakage Breaker Operation ............................................................................ 4-22 4-5-2 Greasing to the Y Axis Guide/Ball Screw..................................................................... 4-23 4-5-3 Greasing to the Z Axis Guide/Ball Screw..................................................................... 4-23 4-5-4 Greasing to the Elevator Axis Guide/Ball Screw.......................................................... 4-23

List................................................................................................ .............................................................................................................. 4-6 Yearly Check List .............................................................................................................. 4-24
4-6-1 X Axis Straightness (Vertically) .................................................................................... 4-24 4-6-2 X Axis Straightness (Horizontally)................................................................................ 4-24 4-6-3 Spindle Axis & X Axis Perpendicularity........................................................................ 4-24 4-6-4 Z Axis Precision Repeatability Measurement .............................................................. 4-24 4-6-5 Spindle Run Out Measurement (Radial Direction)....................................................... 4-24 4-6-6 Replacement of the Air Filter Element ......................................................................... 4-25

............................................................................................................... ................................................................ 4-7 Blade Calibration ............................................................................................................... 4-26 ..................................................................................................... ................................................................ 4-8 Replace Camera Lamp ..................................................................................................... 4-28 ............................................................................................................................... ................................................................ 4-9 Greasing ............................................................................................................................... 4-29

Chapter 5 Accuracy
Tolerance................................................................................................ ............................................................................................................ 5-1 Precision Tolerance ............................................................................................................ 5-2 ........................................................................................................... ................................................................ 5-2 Precision Inspection ........................................................................................................... 5-3
5-2-1 X-axis Straightness (Horizontally) .................................................................................. 5-3 5-2-2 X-axis Straightness (Verticaliy) ...................................................................................... 5-4 5-2-3 Wafer Table Planarity ..................................................................................................... 5-5 5-2-4 Y-axis Index Precision.................................................................................................... 5-6 5-2-5 Z-axis Repeatability........................................................................................................ 5-7

Contents-5

 A-WD-200T

 Contents

5-2-6 Spindle Axis Perpendicularity Against X-axis ................................................................ 5-8 5-2-7 Spindle Run Out (Radial Direction) ................................................................................ 5-9 5-2-8 Spindle Run Out (Thrust Direction) .............................................................................. 5-10 5-2-9 Flange End Surface Run Out ........................................................................................5-11 5-2-10 Dynamic Accuracy...................................................................................................... 5-12

Chapter 6 Troubleshooting

Chapter 7 Error Message

Contents-6

Introduction

A-WD-200T

Introduction

Introduction
Thank you for your purchase of our product. This operation and maintenance manual for full-automatic wafer dicing machine A-WD-200T (“Manual” hereafter) explains effective and life-maximizing operation and maintenance of AW200T. Contents of this manual are based on standard specifications, and therefore may slightly differ from specifications of your A-WD-200T. If you have any queries or anything uncertain about A-WD-200T, do not hesitate to contact us through following address.

Tokyo Seimitsu Corporation
Tokyo Semiconductor Branch Phone +81-422-48-1018 FAX +81-422-49-7315

Introduction-1

A-WD-200T

Introduction

Range of Product Warrantee and Liability
We would like you to acknowledge following items that concern warrantee and liability related to full-automatic wafer dicing machine A-WD-200T (“Product” hereafter).

Product liability and warrantee • Product Warrantee
Tokyo Seimitsu Corporation (“Company” hereafter) warrantees that this product is free of any defect in its craftpersonship and quality. Any damage and/or trouble that occurred to the Product when you were using the Product in conjunction with part (s) of other company and when such part (s) were in any of following conditions will NOT be subject of Company’s warrantee. - You failed not submit Company safety certificate of such part (s). - We did not approve safety certificate of such part(s) you submitted to Company. Note even if Company approves certificate of part (s) you submit to Company, Company does not warrantee that such part(s) are free of any defect in their craftpersonship or quality.

• European product liab ility (CE Marking)
This System is evaluated and found to be in compliance with the following directives and standards that European product liability law demands. With your full understanding of the instructions in the Manual, you are assured that the System is designed to minimize the possibility of accidents. Machinery directive (98/37/EC) EN292-1, EN292-2, EN60204-1 Low voltage directive (73/23/EEC,93/68/EEC) EN60204-1 EMC directive (89/336/EEC, 92/31/EEC,93/68/EEC) EN55011 Class A Group 1: 1991 EN50082-2: 1995

• Period of Warrantee
For period of warrantee, see sales contract.

Introduction-2

A-WD-200T

Introduction

• Range of Warrantee
Troubles or damages that occurred under following conditions will not be subject of warrantee. - Force majeure. - You modified the Product without our approval. - Wrong operation or use that do not comply items described in this manual. - Use of inappropriate process material. Costs of consumable parts, spare parts after expiration of warrantee, labor or transportation should be at your expense.

• Damage and liability
Obey national or local regulations upon use of the Product, or disposal of Product and/or its component. Read our documents including operation- and maintenance manual well and receive proper Product-related training from our trainer prior to your use of the Product. Obey DANGER, WARNING and CAUTION under any circumstance. We are not liable of damages that occurred due to your inappropriate operation or maintenance.

Introduction-3

A-WD-200T

Introduction

We are not liable for any damage caused by modification or change done to documents (including operation manual and maintenance manual) related to the Product, did by anyone other than Company. This System is in compliance with EMC Directive that is a part of the European product liability law, CE marking. All the parts and units of the System were carefully chosen to comply with EMC Directive. Therefore, the System may fail to operate properly with the use of components or parts that are acquired from anyone other than Daifuku’s employees or anyone not appointed by Daifuku to maintain or modify this System. Product may not be able to operate with full capability or act wrongly when, and Company is not liable for damages caused when you use components or parts you acquired from anyone other than Company or anyone not appointed by Company to maintain or modify this Product. We are not liable for any damages caused by defects of components or parts even if acquired such components or parts from those appointed by Company. We are not liable for any loss or damage of which supposed reason is act of running this Product. We are liable to pay responsibility over bodily hazard caused by Company’s act or function of the Product.

Software warrantee and liability
Be informed of following upon use of system software (“Software” hereafter) that Company supply bundled with Product.

• Disclaimer
We grant nonexclusive and untransferable right of use to Customer under following conditions.

• Limit of Use
Your use of software is limited to following. - For your own internal use. - You should not modify, sell or lease the Software. - On the Product only. - Copying of this Software is forbidden. - You are not permitted to reverse-engineer, reverse-compile or disassemble the Software.

Introduction-4

A-WD-200T

Introduction

• Copyright
Intellectual propriety and copyright of the Software, attached documents including manuals of the Software, and duplicate of the Software are reserved by the Company and those approved by the Company. You are not permitted to disclose information included in the Software, documents including manuals of the Software and attached documents including manuals of the Software to third party without our permission.

Manual warrantee and liability
This manual is copyrighted by Tokyo Seimitsu Corporation. Purpose of this manual is limited to support use of the Product only. Use of this manual for any other purpose is strictly forbidden. Copying of whole or part of this manual without our prior consent is strictly forbidden. Act of rewriting or translating whole or part of this manual is strictly forbidden. Contents of this manual are liable to change without prior notice.

Introduction-5

A-WD-200T

Introduction

Definition of Intended Manual Reader
Though this manual assumes anyone who relates with A-WD-200T as reader, definitions of targeted personnels (correspondent to abilities and experiences) are provided to each of descriptions, for safety concern. We define personnels to following three classes. Manual clearly indicates targeted class (together with referent symbols) as follows. To carry out a certain work, you should belong to listed applicable class.

Operator
Operators are, with A-WD-200T, permitted to conduct auto operation, lot operation and setup (replacement of table/blade), but prohibited to do any other work. Which mean, operators are not allowed to turn on power supply, startup, or open any covers or panels of A-WD-200T under any circumstance. Operators are requested to read contents of operation manual of AWD-200T to sufficiently understand work procedure before actually starting the work.

Maintainer
Maintainers are, with A-WD-200T permitted to conduct all works that operators are permitted to, plus setup, editing of parameters, maintenance and registration of screens, in addition to permitted to supply and replace consumable parts. Maintainers MUST attend our training and gain sufficient knowledge and operative skill with A-WD-200T. Maintainers are also requested to thoroughly read contents of operation-and-maintenance manual of A-WD-200T to understand characteristic of A-WD200T and all contents of their work before actually starting the work.

Service engineer
Service engineers are personnels in charge of works that require special knowledge and skill, like installation of A-WD-200T or Configuration. Basically, our service technical staffs are supposed to do service engineering. Which means, operators and maintainers are not allowed to install/modify A-WD-200T, change system data or control data, change option setting or install software under any circumstance.

Introduction-6

A-WD-200T

Introduction

System Installation Condition
This System is declared to be in compliance with EMC Directive under the condition of Class A, Group 1 described in EN55011. Therefore, customer need to fulfill the following installation conditions, otherwise the compliance with EMC Directive will not be satisfied.

EN55011 Class A, Group 1 WARNING The apparatus shall not be used in the residential, commercial and light-industrial environment unless the apparatus also conform to the relevant standards. (EN55011, group 1 class A) This System is an automatic freight transportation system that is designed to be installed in the industrial environment (the environment where no residential area, medical facility, and commercial region are nearby). The System must not be installed outside the targeted environment against the requirement of EMC directive for CE marking.

WARNING The Installation is carried out by formal employee of the Daifuku Europe Ltd or the Daifuku Co., Ltd who have participate and completed the full training curriculum by and at the Daifuku Europe Ltd or the Daifuku Co., Ltd. The installation and reinstallation of the System by the customer is prohibited. operations are required, please contact Daifuku. When such

WARNING This System is designed with the premise that it be used in the controlled environment. In order to assure the safety operation, routine medical checkup shall be performed on all the relevant personnels in accordance with local law of the country where the System is installed. And those that require or diagnosed by a doctor to have the support of heart pacemaker or other electrical medical equipment should not be assigned to perform tasks relating to this System or tasks require being around this System. It is possible to cause malfunction of their electrical medical equipment and lead to critical condition.

Introduction-7

Chapter 1

 Safety

A-WD-200T

Chapter 1 Safety

1-1 Before Using A -WD-200T
This “Safety” chapter explains safety-related items you need to be careful when you handle A-WD-200T.

A-WD-200T operates under high voltage, and contains various sections (like blades and driving mechanisms) that may harm human bodies if you handle incorrectly. Therefore, not only those who operate A-WD-200T but anyone who maintain or work nearby A-WD-200T are requested to read well and understand safetyrelated items in this manual.

WARNING
Users of A-WD-200T are requested to read our operation manual and maintenance manual bundled with A-WD-200T andbe free trained with operation of A-WD-200T by our instructor before actually working with A-WD-200T.

1-1

A-WD-200T

Chapter 1 Safety

1-2 WARNING, DA NGER and CAUTION in this Manual
1-2-1 Hazard level
This manual classifies level of hazards during operation and maintenance of AWD-200T by three categories – DANGER, WARNING and CAUTION. Read and understand the indications fully before your operation or maintenance of A-WD200T. DANGER / WARNING / CAUTION titles depend on seriousness of hazards (DANGER > WARNING > CAUTION) described as follows.

DANGER
DANGER describes most dangerous of hazards. If you disobey described prevention, directly serious or even fatal bodily injury occurs.

WARNING
WARNING describes second dangerous of hazards. If you disobey described prevention, serious or even fatal bodily injury may occur.

CAUTION
CAUTION describes third dangerous of hazards. If you disobey described prevention, moderate bodily injury may occur.

Notes
“Notes” without hazard indication describes items that may cause damage to the system, equipment or units if you disobey described prevention.

1-2

A-WD-200T

Chapter 1 Safety

In addition to hazard level indications described so far, you can find following notices in this manual.

IMPORTANT
Information personnels must know.

REMARK
Useful information and tips.

1-3

A-WD-200T

Chapter 1 Safety

1-2-2 Symbols
You can find following symbols next to DANGER, WARNING, CAUTION and IMPORTANT indications to visually signify what those indications stand for.

Highly hazardous high voltage sections are present among electrical system inside A-WD-200T. Shutdown breakers for A-WD-200T and power distribution panel before maintenance to prevent electrical accident due to contact with high voltage sections.

Driving mechanisms are present inside A-WD-200T. Do not carelessly insert fingers or hands into inside of panel, or driving gears and belts pinch your fingers and hands and thus cause unexpected accidents.

Highly heated sections are present inside A-WD-200T. Highly heated surface may cause scald. Wait until highly heated sections cool down safe enough before working with.

This symbol tells what you should NOT do.

This symbol tells what you MUST do.

1-4

A-WD-200T

Chapter 1 Safety

1-3 Hazard Warnin g Label
Potentially dangerous sections of A-WD-200T have hazard warning labels on. Hazard warning labels, in sizes and colors that catch attention of personal eyes, describe contents of warning and symbols that tell type of hazard type.

WARNING
Find where are, read contents of and fully understand hazard warning labels on A-WD-200T before doing any work with.

WARNING
When hazard warning labels peel off or are unreadable because of wears, contact our service engineer and attach new labels.

1-5

A-WD-200T

Chapter 1 Safety

1-3-1 Hazard warning lab el types
A-WD-200T has following types of hazard warning labels on.

Highly hazardous high voltage sections are present among electrical system inside A-WD-200T. Shutdown breakers for A-WD-200T and power distribution panel before maintenance to prevent electrical accident due to contact with high voltage sections.

Driving mechanisms are present inside A-WD-200T. Do not carelessly insert fingers or hands into inside of panel, or driving gears and belts pinch your fingers and hands and thus cause unexpected accidents.

Highly heated sections are present inside A-WD-200T. Highly heated surface may cause scald. Wait until highly heated sections cool down safe enough before working with.

1-6

A-WD-200T

Chapter 1 Safety

1-3-2 Locations of hazar d warning labels

WARNING
You are NOT allowed to change location of hazard warning labels. Make sure to apply to new label on exactly same location of the label you replaced.

1-7

A-WD-200T

Chapter 1 Safety

is on primary terminal cover, inside BOX, and

is at the surface of BOX.

1-8

A-WD-200T

Chapter 1 Safety

1-9

A-WD-200T

Chapter 1 Safety

1-10

A-WD-200T

Chapter 1 Safety

1-11

A-WD-200T

Chapter 1 Safety

1-4 Safety Counter measures
1-4-1 Safety precautions
While A-WD-200T is protected by various safety devices including safety interlocks, following basic safety-related cautions are for you to read.

DANGER
Observe following instructions by any means when you use AWD-200T. Otherwise, bodily injuries or hazardous accidents may occur.

- Read and understand this manual fully before actually using A-WD-200T.

- Alert everyone who are working nearby A-WD-200T you are maitaining before you operate that A-WD-200T.

- Use correct tools by proper procedures.

- Wear proper protective gears properly.

- Remove metals (like rings or wristwatches) from your body before you work on active electric circuit.

- When you work on running electric circuit, do not work by yourself alone, and make sure someone who can visibly or audibly notice you is present.

- Learn emergency process (See 1-5 Emergency process), where are medikits, and locations of and how to use fire extinguishers.

- Put up notice showing emergency evacuation route guidance in any working area.

1-12

A-WD-200T

Chapter 1 Safety

- Remember emergency evacuation route and site.

- Make sure emergency evacuation route is not blocked by objects.

- Indicate emergency contact address in any working area.

- Carry heavy objects by more than one persons.

1-13

A-WD-200T

Chapter 1 Safety

1-4-2 Safety interlock sy stem • Interlock list
No. Item 1 EMO

Location Function Override One on When you press EMO, instant N/A front power supply shutdown process panel. starts by;
1. Electromagnetic relay for primary side (3phase, AC200V) of main transducer turns off.

Recovery Circuit Turn-and-reset EMO, FULL then press H/W EMO_RESET switch to recover power.

2 Fan

sensor

3 Cover

lock and interlock switch_1

Electromagnetic relay for secondary side (AC100V) of UPS turns off. 3. Remote off signal reaches UPS. Attached This sensor monitors rotation of fan N/A to fan as long as A-WD-200T power is on. inside Abnormal rotation immediately electricity shuts down power (same as EMO). cabinet. operating Grinder 1. A transparent cover is covering With Disable key section, loader section, and at the same interlock and Disable switch and time is a cover for spindle axis switch, equipped on loader access opening (for replacement front panel, interlock cannot be released section. of blade.) (the LED of Disable 2. This cover is protected by switch flashes). normally-closed electromagnetic This "disabled" lock, whose lock/unlock is condition is controlled by software. released with 3. However, relay circuit is equipped closing cover and on this electromagnetic lock to starting normal prevent to release without turning operation. OFF the power. 4. Electromagnetic lock here contains sensor that detects "closed" condition, and once lock is unlocked, powers for motors in grinder section and loader section turned off. Z-axial stepping motor does not stop however, since power off causes fall; instead, a relay (no contact type) cuts command pulse to driver of Zaxial stepping motor. (H/W)

2.

Rotate fan securely, FULL then press H/W EMO_RESET switch to recover power. Close cover and S/W operate with touch H/W panel to resume. &

1-14

A-WD-200T

Chapter 1 Safety

No.

Item lock and interlock switch_2

Location Cassette ejector section.

Function 1. 3 cassette doors are locked N/A (controlled by software) as long as A-WD-200T is running. 2. Software-controlled action; This door lock opens when operator operates with touch panel upon inserting/extracting cassette. After operation through touch panel, elevator stops moving, and door lock opens. 3. Once you open door, door sensor (proximity sensor) detects open door, and relay (no contact type) cuts command pulse to driver of elevator driving motor. At this point, power to clutch brake turns off too, so brake activates accordingly (all of actions caused by opening of door is softwarecontrolled).

Override

Recovery

Circuit &

4 Cover

Operator sets cassette, H/W then close door, and S/W operate (with touch panel) to finish setting. Then A-WD-200T resumes functioning.

5 Side

cover interlock switch
6 Overflow

sensor

7 Water

leakage detector band

Lower cover on left side surface. (optional) Left inner of oil pan in grinder section. Directly below oil pan in grinder section.

This switch detects opened cover of left side surface of electrical cabinet. Result of detection is same as what happens when you press EMO. This interlock stops A-WD-200T when drain from oil pan in grinder section is clogged, thus raising level in oil pan. This interlock stops A-WD-200T upon detecting leakage from lower of oil pan in grinder section is detected.

Pull switch Close cover, then press H/W toward you to EMO_RESET switch to override. recover power.

N/A

Drain securely, lower S/W level inside pan, then restart. Locate and repair water S/W leakage, then restart.

N/A

1-15

A-WD-200T

Chapter 1 Safety

No Item . 8 Water

Location
1. Directly

Function 1. If water leaks from any N/A of pipe joints, pan holds water then drains to drain side.

Override

Recovery

Circuit

2. Water leakage sensor, located in drain section, stops A-WD-200RT upon detection of water leakage.(S/W) When breaker turns off and trips, electromagnetic relay at secondary side of UPS turns off in sync. And then remote off signal goes to UPS. 10 Air Master This interlock monitors air pressure pressure pressure, and upon down of detection of abnormal fall supplied of pressure, stops air. spindle and A-WD-200T. 11 Spindle Monitored This interlock monitors cooling amount of amount of cooling water, water cooling and upon detection of down water. abnormal fall of amount, stops spindle and A-WD200T. 12 Spindle Embedde This interlock, upon motor d in detection of overheating overheate spindle in spindle motor, stops d motor. spindle and A-WD-200T.

below joints leakage from pan -> holder pan important and water pipes. 2. At drain leakage section detector from band water leakage band -> pan. 9 Main Suppleme breaker ntary contact point of breaker.

Locate and repair water S/W leakage, then restart.

N/A

FULL H/W

N/A

Solve abnormality, then S/W restart.

N/A

Solve abnormality, then S/W restart.

N/A

Solve abnormality, then S/W restart.

1-16

A-WD-200T

Chapter 1 Safety

1-4-3 Lockout / tagout
Lockout prevents unexpected startup and release of accumulated energy in order to protect personnels during maintenance and inspection. Tagout prevents anyone other than those working on A-WD-200T from turning operation handle to ON by application of tag which prohibits operation to main power breaker.

DANGER
You are requested to recognize importance of lockout and fully acknowledge lockout procedure described here before you conduct servicing of A-WD-200T,

DANGER
Lockout power of A-WD-200T by following procedure before any service of A-WD-200T which does not require electricity.

WARNING
If A-WD-200T is still running, stop the system completely by referring to “4-2 System Shutdown” before lockout.

1-17

A-WD-200T

Chapter 1 Safety

WARNING
In any case more than one workers do service of A-WD-200T togther at the same time, appoint a "supervisor" who supervises all of such workers. Supervisor is requested to be aware of working status all the time, and to play unique role in lockout procedure.

• Lockout / tagout proce dure

Shutdown main power by rotating handle of main breaker (on left side surface of A-WD-200T) to [O] off side.

1-18

A-WD-200T

Chapter 1 Safety

Pull out handle lock tab out of operation handle of main power breaker.

Handle lock tab

Let shackle of padlock loop through hole in handle lock tab, then securely lock padlock.

Test and confirm that you cannot rotate operation handle of main power to [I] (ON) direction. If you cannot, then lockout is complete.

Padlock

1-19

A-WD-200T

Chapter 1 Safety

Hang an OSHA tag, which warns anyone to avoid operation, from hole in handle lock tab so no one will start up power carelessly.

OSHA tag

1-20

A-WD-200T

Chapter 1 Safety

1-4-4 Protective equipme nt

WARNING
Always put on following protective equipment when you are inside clean room.

Dust-free garment Mask

Rubber gloves

[Conventional protective equipment]

1-21

A-WD-200T

Chapter 1 Safety

1-5 Emergency
1-5-1 Emergency machin e off switch (EMO)
A-WD-200T has an EMO (Emergency Machine Off) switch for you to shutdown power upon emergency.

• Usage of EMO switch
Press EMO switch (red mushroom-shaped rotary lock switch located on front of A-WD-200T) to stop A-WD-200T upon emergency. Once you press EMO switch, driving sections inside A-WD-200T stop immediately, and disable power and magnet for devices like motor driver, valve driver, and such devices become free.

REMARK
-Elevator is protected by no-fall mechanism, so elevator will not fall even if motor magnet is disabled. -Though Z-axis will be no longer held by motor, no-fall mechnism will balance Z-axis. -Valves related to vacuum, arm retraction/extension and up/down move stay fixed on current position in order to prevent assemblies from falling. -Do not carelessly press emergency stop switch; once you pressed, entire power supply inside system is turned OFF so that hard disk installed inside personal computer may be crashed.

Emergency machine off switch (EMO) Yellow round label with “EMERGENCY notice. OFF”

1-22

A-WD-200T

Chapter 1 Safety

• Recovery from emerg ency stop

DANGER
Make sure no one is working with A-WD-200T before recovering from emergency stop. In addition, make sure inside of A-WD-200T is free of any tool or alien object, and that A-WD-200T will be able to operate properly when power starts to run.

Rotate EMO switch clockwise to quit emergency stop.

Next, press emergency stop reset switch (push-button on right of main power breaker) to supply power to control section of A-WD-200T.

1-23

A-WD-200T

Chapter 1 Safety

• Circuit diagram of EM O switch

To each section

AC Line Input

Switchgear Breaker Wire Loop1 Trans. (Main) UPS

Switchgear

Wire Loop2

Connection point of Wire Loop

1-24

Magnetic Relay

Main Trans TC1 CB 3 30A AC100Vout KM 2

A-WD-200T

AC100V SUPPLY1

Power Connector Magnetic Relay

Main Breaker

EL Breaker

Noise Filter

Magnetic Relay

AC100Vout

AC100Vin UPS

3phaseACin AC100Vout

ACin 3phase 200V/220V/380V/415V

AC100V SUPPLY2

1-25
NF 1 KM 1 KM 3 Mini Trans1 AC24Vin AC24Vout AC24Vout ACin ACin Wire Loop 1 CB1 0.5A TC2 CB 4 5A CB 6 1A

CN 1

QF 1

QF 2

Mini Trans2 AC24Vin AC24Vout TC3 CB 7 5A AC24Vout Wire Loop 2 AC24Vout

Chapter 1 Safety

A-WD-200T

Chapter 1 Safety

Latch EMO Reset EMO event contact1 RL42 RL35

AC24V-H1 KM1 AC24V-N1 Switchgear

WireLoop1

EMO event contact2

Latch
EMO Reset RL36

RL31

RL-UPS-off
RL38 RL43

RL43=Timer Relay
JP7 RL37 JP8

+24V_MTR1
RL32 RL44

KM3

Switchgear
RL45 AC24V-H2 KM2 AC24V-N2 WireLoop2

Switchgear

In standard specification, EMO event means: 1. EMO switch 2. FAN sensor

1-26

A-WD-200T

Chapter 1 Safety

1-5-2 Emergency counte rmeasure • Bodily accident
Once any personal bodily accident occur when A-WD-200T is operating, act as follows.

Once you spot the accident, inform nearby personnels at once. Remove suffering person to safe place and give proper medical treatment. 1. Press EMO switch. 2. Confirm that power is shut down, and all driving sections are stopped. 3. Those responsible for the work hear details of accident from those who were doing work at the time of accident, and find out circumstance and cause of accident. 4. Those responsible for the work report us details of the accident. 5. Extinguish fire using fire extinguisher for chemicals. 6. Worker’s responsibility should contact us.

DANGER
Once any accident occurs while A-WD-200T is running, press EMO switch immediately to stop A-WD-200T in order to prevent secondary hazard.

WARNING
Please do not fail to report us details of any accident, regardless of size or cause.

1-27

A-WD-200T

Chapter 1 Safety

• Fire
Once any fire starts burning when A-WD-200T is operating, act as follows.

1. Once you spot fire, inform nearby personnels at once. 2. Remove any injured person to safe place and give proper medical treatment. 3. Press EMO switch. 4. Confirm that power is shut down, and all driving sections are stopped. 5. Extinguish fire with extinguisher suitable for chemical fire. 6. Those responsible for the work report us details of the accident.

DANGER
Press EMO switch and stop A-WD-200T once any fire start. If A-WD-200T is powered when you are suppessing fire, electrical leakage and electric secondary disaster may happen.

DANGER
If you use CO2 extinguisher to suppress fire, loss of oxygen may become lethal. After end of fire fighting, evacuate immediately to safe place.

WARNING
Please do not fail to report us details of any accident, regardless of size or cause. Our service engineers are reponsible for later treatment.

1-28

A-WD-200T

Chapter 1 Safety

• Earthquake
Once any earthquake happens when A-WD-200T is operating, act as follows.

1

Press EMO switch.

2. Remove any injured person to safe place and give proper medical treatment. 3. Those who were responsible for the work should guide every working personnels to safe place according to standard at your side.

DANGER
Do NOT approach A-WD-200T until earthquake is over for sure.

4. Once chance for next earthquake is presumably none and resume of operation with A-WD-200T is considered possible, check following.

- Damage to A-WD-200T. - Anything that fell nearby or inside A-WD-200T. - Utility connection and condition of piping. - Any abnormality in power supply.

5. If you spot any abnormality during these checks, contact us. Our service engineers treat such abnormality accordingly.

1-29

A-WD-200T

Chapter 1 Safety

• Power failure
Once power fails when A-WD-200T is operating, act as follows.

1. Confirm power supply to primary and secondary side is active. 2. Confirm absence of abnormality, then restart the system by referring to Chapter 4 4-1 Startup in operation manual.

IMPORTANT
A-WD-200T equipped with uninterruptible power supply (UPS) retains running status as long as effect of power failure was up to secondary side or less. Otherwies, interlock activates, and escape action ensues.

1-30

A-WD-200T

Chapter 1 Safety

1-6 A-WD-200T Ha zardous Locations
1-6-1 Hazardous driving sections

DANGER
A-WD-200T has mechanical driving sections which crushes and pinches and thus may kill or seriously harm personnels if you fail to obey following contents. Obey contents of this section when you work with mechanical driving sections.

Do not open cover of running A-WD-200T body with interlock disabled.

Do not open panel when A-WD-200T is running; especially DO NOT OPEN side and rear panels of elevator device, which vertically moving elevator may bind your inserted hand or any part of body.

1-31

A-WD-200T

Chapter 1 Safety

Do not disable interlock, open cassette rack and insert hand or any part of your body when A-WD-200T is running.

Do not let hand or any part of your body approach X-axis section when A-WD-200T is running.

Do not let hand or any part of your hand approach elevator section or frame transefer device when A-WD-200T is running.

1-32

A-WD-200T

Chapter 1 Safety

Do not let hand or any part of your hand approach shutter section or spinner section when A-WD-200T is running.

Do not insert your hand or body into Y-axial section when A-WD-200T is running.

Do not insert your hand or body into Z-axial section when A-WD-200T is running.

1-33

A-WD-200T

Chapter 1 Safety

1-6-2 High voltage hazar dous sections

DANGER
A-WD-200T has mechanical driving sections which may kill or seriously harm personnels if you fail to obey following contents. Obey contents of this section when you work with mechanical driving sections.

Do not let persons approach or attempt to contact following sections.

X-axial controller Spindle 2 controller Spindle 1 controller θ^axial controller PC

Spinner controller

Z2-axial Z1-axial

Y1-axial controller Y2-axial controller VME rack

1-34

A-WD-200T

Chapter 1 Safety

1-6-3 Hazardous highly h eated sections

WARNING
A-WD-200T uses halogen lamp as light source for microscope. Microscope lamp is hot during and directly after use, so wait sufficiently until temperature of microscope lamp surface cools down to less than 50 degrees centigrade before touching lamp for replacement or any other purpose.

Microscope lamp

1-35

Chapter 2 Configuration and Calibration

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-1 Appearance an d Parts
2-1-1 Front View
Cover Interlock Release Switch Power Switch Supply Signal Tower Touch Panel Display

Air Pressure Gauge

Flow Meter

Inspection Tray

Cassette1 EMOSwitch High Pressure Pump Gauge Tool Box Cassette 2 Dress Cassette

Tool Box ( UV Unit )

2-1 1

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-1-2 Left View

Exhaust Duct Signal Tower

EMO Reset Switch

Main Breaker

UPS Switch & Indicator

2-2 2

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-1-3 Right View
Cover Interlock Mechanical Switch Touch Panel Display Signal Tower

2-3 3

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-1-4 Back View

Signal Tower

Drain DI Water Connection City Water Connection N2 Connection Spare Connection Spare Connection Air Pressure Gauge (For general use) Air Supply Connection

Air Pressure Gauge (For X axis and Spindle use)

Power Supply

2-4 4

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-1-5 Top View

Exhaust Duct

Loader Cover (Rear)

Touch Panel Display Loader Cover (Front)

Spindle Cover

2-5 5

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-2 Main Features
2-2-1 Main body • Cutting Station Mecha nism

Refer to the figure below for dicing axial directions.

Y1 axis

Y2 axis Z1 axis

Z2 axis

Theta axis

X軸

2-6 6

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Cutting Table
The wafer is held by vacuum and mechanical clamping device.

Clamp divice

Optical Cutter set Unit

Cutting Table

2-7 7

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• X Axis
The X-axis of the cutting table is a carrier mechanism moving in the alignment and cutting directions driven by linear motor.

2-8 8

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Theta axis
The Theta axis rotates the cutting table clockwise and counterclockwise.

CW

CCW

2-9 9

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Y1-axis, Y2-axis
Each Y1-axis and Y2-axis moves the spindle back and forth individually, driven by stepping motor. Spindle unit located rear side called Y1, and that in front side called Y2.

Y1-axis

Y2-axis

2-10 10

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Z1-axis, Z2-axis
Move the spindles up and down.

The unit located rear side called Z1, and that in front side called Z2.

Z1-axis

Linear Guide

Z2-axis

Stepping Motor

2-11 11

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Spindles (SP1 and SP 2)
The spindles are powered with a brushless DC motor that rotates dicing blade in a high speed. Spindle 1 is in the back. Spindle 2 is in the front.

Spindle 1

Blade Breakage Detector Flange Cover Spindle 2

Blade

Cleaning Water Nozzle

Cutting Water Nozzle Blade Cooling Water Nozzle

2-12 12

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Microscope(CCD Camera)
The microscope camera captures the image used for automatic wafer alignment and kerf check functions.

Microscope Unit

Viewer Air Camera Blow Air

2-13 13

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Pre-Cleaning Unit
During cutting, the shutter is closed. wafer. The nozzle on the bottom side of the

shutter sprays water and/or air to clean sawing dust from the topside of the

Water Nozzle Air Nozzle Shutter

2-14 14

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-2-2 Spinner Cleaning U nit
Sawn wafer is cleaned with high pressure water spray cleaning system (low pressure cleaning also available as an option), rinsed and then dried with N2 gas (or air clean dry air).

Low Pressure Cleaning Nozzle Rinse Nozzle

High Pressure Cleaning Nozzle

N2 or Clean Dry Air

Spinner Table

Back Side Dryer

2-15 15

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-2-3 Loader Unit • Elevator
The elevator is used for wafer frame transfer between cassette and frame handling system (Revolving arm).

Frame Guide

Finger Arm

Finger Frame Sensor LM Guide Ball Screw

2-16 16

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Revolving Arm (Frame Transfer System)) )
Frame Transfer system transfers the wafer from and to the following positions: 1. From pre-alignment to pre-loading stage 2. From pre-loading stage to the cutting table 3. From the cutting table to the spinner table 4. From the spinner table to the pre-alignment stage on the elevator

Stain Arm (Used for 3 indicated above)

Clean Arm (Used for 1, 2 & 4 indicated above) Frame Vacuum Chuck

2-17 17

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Cassette Rack
Cassette Rack is used to store the wafer cassettes before and after cutting.

[Inspection Tray]

Stores wafers for wafer inspection or single wafer cutting.

[Cassette 1 / 2]

Protection Bar Base Sensor Cassette Sensor Cassette Guide

[Dress Cassette]

Stores wafers for blade dressing.

2-18 18

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-2-4 Control System • Touch Panel Displa y
The operating interface is a touch panel LCD monitor. Except for the mechanical switching systems such as Emergency Power OFF and the power supply switch, all other functions can be operated from the Touch Panel Display.

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 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Electrical Units and Drivers
The X, Y, Z and Theta axis motors are controlled with the associated drivers.

X-axis Linear Motor Driver Spindle 2 Motor Driver Spindle 1 Motor Driver PC Theta Axis DD Motor Driver

Spinner Motor Driver

Z2-axis Stepping Motor Driver

Z1-axis Stepping Motor Driver

Y1-axis Stepping Motor Driver Y2-axis Stepping Motor Driver VME Rack (from the left) 1)MainCPU 1)Main 2)COGNEX 2) 3)AXCTL 3) 4)AXCTL 4) 5)AXCTL 5)

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 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-2-5 Other Units • Control System for Air, Vacuum and Water

Flow Sensor (Spindle Cooling Water)
Flow Sensor (DI Water)

Loader Unit Electromagnetic Valve/ Vacuum Ejector

Air Pressure Regulator For X-axis / Spindle

Air Pressure Regulator For General use Electromagnetic Valve For Cutting Station

Cutting Station / General Vacuum Ejector

2-21 21

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• PC Protection:

(UPS)

The Uninterrupted Power Supply (UPS) device activates in the event of power failure to ensure uninterrupted power to the controller and PC system.

Reset Battery Check

Bypass Power Switch

2-22 22

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-2-6 Special Options • Table Options
Cutting Table Spinner Table

• High Pressure Pum p

High Pressure Pump

2-23 23

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-3 Calibration Pre paration
2-3-1 Exterior Panel
The exterior cover panels are fixed in 2 methods. Cover panels with key holes are fixed by a key locking system. Others are fixed with bolts. The vertical panels are held up with a support hook underneath the cover. When installing, hook the cover onto the support hook at first. Refer below for the name of some of the major cover panels.

Flow Gauge Panel

Spindle Cover Rear Loader Cover

Loader Cover

Front Cover A

Front Cover C

Front Cover B

2-24 24

 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Install/Removal of the Front Cover A, B and C
The Front Cover A is secured with 2 bolts (M4) hidden in the toolbox as shown in the picture below. The Front Cover B is fixed with a bolt (M4) on top of the cover. When working with floppy disk, remove Cover B. The Front Cover C is fixed with 2 bolts from both sides on the top hidden under Cover A and B. Removal of the Cover C is not necessary in general maintenance, however, to remove this cover, you must remove Cover A and B at first.

Location of the Front Cover A Fixing Bolts (2 circled locations)

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 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Install/Removal of Keyed Covers
Covers with a keyhole can be installed and removed by key. Insert the pointed side of the key (tool) into the keyhole, continue pushing the key until you hear a click, then the cover can be removed. The key tool can be used for handles to carry covers. To remove the key, turn it over 90° and pull it out. It can not

remove without rotating for safety.

Key (Tool)

Insert the Key into the Keyhole

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 A-WD-200T

2  Chapter 2 Configuration and Calibration

• Install/Removal of the Rear Loader Cover
The rear loader cover is fixed with 3 bolts (1 in the back, 2 in the front of the machine). The bolts in the front are on the loader cover support frame (refer to figure below). To open the cover while the machine power is ON, you must release the interlock at first. (Refer to next Chapter “2-3-2: Release Interlock” )

Location of Rear Loader cover Fixing Bolts in Front Side

2-27 27

 A-WD-200T

2  Chapter 2 Configuration and Calibration

2-3-2 Release Cover Inte rlock

W A R N I N G
The machine can be operated while the loader cover is open if the cover interlock is released. However, the interlock must remain untouched During maintenance work, Please be aware that unless it is necessary for maintenance work.

you must be fully responsible for your own safety. cause damage to the machine.

each axis is able to operate individually, in case of operation error, it can Service Engineers must have full knowledge of the machine before performing any maintenance work.

For safety reason, the loader cover is locked while the machine is operating. To open the cover while the machine is operating, release the interlock by following the steps as follows. When the interlock is released, the machine can be operated while the cover is open. Hands or fingers must be kept out of axis to avoid injury. To avoid serious injuries, make sure that the Emergency Power Off is always able to access.

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 A-WD-200T

2  Chapter 2 Configuration and Calibration

1)Release Mechanical Switch 1)
Use a screwdriver to turn the mechanical switch located at the upper right front of the machine to UNLOCK position.

Cover Interlock Mechanical Switch (Right Side of the Machine)

2)Release Key and Switch 2)
Insert the key into the keyhole on the front panel release switch, turn it 90° counter clockwise (note that the key cannot be removed at this position). Press the release switch button, interlock is deactivated when the button is flashing. After work, turn the mechanical switch back to LOCK position. Verify that the release switch is no longer flashing.

Release Key (Effective Position)

Release Switch

Interlock Release Key and Switch

2-29 29

 A-WD-200T

Chapter 2 Configuration and Calibration  

2-4 Maintenance
2-4-1 X-axis • Configuration

X-axis Air Bearing Guide Rail Optical Cutter Set Board

X-axis Linear Scale /Head

X-axis Carriage (Without the Oil Pan and Cover, etc.)

X Carriage Air Bearing Guide Rail Linear Motor (Stator)

Position of the Linear Motor
The X-axis is supported by the air bearing and driven by the linear motor. Because the X-axis is running without any contact to other parts, greasing will not be needed at all. The air bearing is a very delicate structure, contact TSK for any problems you may find during operation.

2-30 30

 A-WD-200T

Chapter 2 Configuration and Calibration  

• Location of the Origin Sensor

Sensor Flag (Fixed to the carriage)

X-axis Origin Sensor (Photo Sensor)

X-axis Origin Sensor and Sensor Flag

2-31 31

 A-WD-200T

Chapter 2 Configuration and Calibration  

2-4-2 Y-axis • Drive Units

Ball Nut



Linear Scale

Stepping Motor (Hollow Type)

Ball Screw

Y-axis Drive Units Viewed from Arrow A

Y1 and Y2 axis are each moving on a linear guide with a ball screw. The ball screw is stationary with the stepping motor driving the ball nut, motor and axis assembly along the ball screws. Two reading heads share the scale. This is the same type of scale as Xaxis scale. It does not require regular maintenance. The Y-axis fine sensor is used for positioning the absolute coordinate of the two Y-axes on a scale. Because of the criticality of the Y-axis positioning precision, only TSK service engineers must perform calibration of the origin sensor, sensor flag and the fine sensor.

2-32 32

 A-WD-200T

Chapter 2 Configuration and Calibration  

• Sensor Locations

BBD Relay Board Origin Sensor (Photo Sensor) Stepping Motor Ball Screw

Origin Sensor Locations (Photo Shows Y1-axis Side)

Sensor

Sensor (Head)

Y-axis Fine Sensor

2-33 33

 A-WD-200T

Chapter 2 Configuration and Calibration  

2-4-3 Z-axis • Configuration and Sen sors
Stepping Motor (With Encoder)

Origin Sensor (Photo Sensor)

Sensor Flag

Z-axis Origin Sensor Locations
Z-axis uses stepping motor with encoder to move the ball screw.

2-34 34

 A-WD-200T

Chapter 2 Configuration and Calibration  

2-4-4 Theta Axis • Configuration and Sen sor Arrangement
Frame Clamper (4 Locations)

Theta DD Motor (With built-in encoder and brake)

Origin Sensor (Photo Sensor) Frame Clamper

Drive Air Piping CT/Wafer Vac. Piping

Sensor Flag Theta Brake Drive Air Piping

Theta Unit Configuration and Sensor Arrangement (without covers)
DD Motor with a built-in encoder and brake system operates Theta axis. The vacuum piping for fixing cutting table and wafer runs through center part of thee motor with rotary joint. Rotary type air actuator actuates the flame clampers and driving air for them runs though the motor.

2-35 35

 A-WD-200T

Chapter 2 Configuration and Calibration  

2-4-5 Spindle • Replace Brush
The spindle is an air bearing structure. Two carbon brushes are used to make contact with the spindle shaft for contact cutter set to verify the electrical constantly between the cutting table and the blade. If error occur repeatedly, check the shaft and the contact surface for abrasions or damage. Make sure to shutdown the power and air prior to removal/install of the spindle brush. When the air is ON, it will be difficult to mount the brush and this may cause problems later on.

Fixing Screw of Brush

Encoder Cover (Do not remove)

Brush Cover

Spindle Brush (two screws hold the brush from back of the brush)

Install/Removal Spindle Brush:
1) Shutdown the power and air. 2) Remove the brush cover in the back of the spindle. 3) Remove the screws from the brush (2 on the outer side), gently remove the two brushes in the center. spring.) 4) Install the brush (opposite procedures as removal). mount the O ring when you install the brush cover. Do not forget to (The carbon brush is fixed on the tip of

2-36 36

 A-WD-200T

Chapter 2 Configuration and Calibration  

Brush replacement of Spindle1 (Rear side spindle) can be accessed only from the backside of the machine. Remove the rear loader cover and the mist divider, move the shutter and the spindle aside so that it is easy to work on spindle.

Fixing Screw

Mist Divider

Mist Divider and Screw Location

2-37 37

 A-WD-200T

Chapter 2 Configuration and Calibration  

• Shutter

Water Curtain Nozzle

Air Curtain Nozzle

Shutter Drive Cylinder

Shutter Guide

Shutter

The cylinder runs the shutter with water and air curtain nozzles. Remove the shutter guide to remove the shutter when necessary for calibration. When re-

installed, make sure that the shutter moves freely without obstructing movement of other components.

Shutter Drive Cylinder

Shutter Speed Controller Shutter Cylinder and Speed Controller Arrangement (Back side of the machine)
2-38 38

 A-WD-200T

Chapter 2 Configuration and Calibration  

Cylinder Sensor Position

Shutter Cylinder Sensor Position

2-39 39

 A-WD-200T

Chapter 2 Configuration and Calibration  

2-4-6 Flange Cover • Install / Removal of th e Flange Cover
The flange cover is designed to open and close automatically. is fully opened when it reaches the top of the Z-axis. The

movable part moves around the hinge to open the cover. The flange cover The flange cover is fixed onto the spindle by 3 screws. The cutting water nozzle, blade cooling water nozzle and BBD (Blade Breakage Detector) are all fixed to the flange cover. The cleaning spray nozzle is secured on the spindle holder. To install/remove the flange cover, remove the spring and the BBD first and then remove the screws. Have Z-axis all the way up to minimize spring tension when you begin flange cover removal.

When re-install the flange cover back together, mount the blade install/removal tool, and slightly calibrate the blade nut so that it can be removed/installed smoothly.

Although the flange cover can be installed/removed with the flange on, there is a risk for damaging the flange. Therefore, it is recommended to remove the flange before installation and removal work.

Tension Spring BBD Screw

SP1 Flange Cover (Fully Closed)

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 A-WD-200T

Chapter 2 Configuration and Calibration  

Cover Lever Tension Spring Fixing Screw

Fully Opened Flange Cover (Z-axis is on Top Position)

• Nozzle Adjustment
Refer to Chapter 4-2-1 (Checking Nozzles) Adjust the cutting water nozzle to balance between right and left against to blade. Make the adjustment using a mirror while the water is ON. If the cooling water is not spraying evenly from all nozzle slits, the slit may be clogged. Use fine metal feeler gauge to clean the inside of the slit or remove the pipe screw to clean inside of the pipe with a cotton swap.

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 A-WD-200T

Chapter 2 Configuration and Calibration  

• Install, Removal and C leaning BBD
Lock Ring

BBD

Blade Breakage Detection System
The BBD is fixed by a quick disconnect locking system. To remove, press the locking ring toward the arrow as shown in the figure above. Gently pull out the BBD from the flange cover. To install, again gently press the locking ring toward the arrow, be careful not to damage the prism on the tip. Do not force it down, it can cause damage to the BBD prism. As shown in the figure below, dip a cotton swap in ethanol and use it to clean the prism surface. We recommend you clean the prism surface each time the blade is replaced.

Cleaning the Prism

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 A-WD-200T

Chapter 2 Configuration and Calibration  

2-4-7 Optical Cutter Set
The Optical Cutter set (OPC) is used to measure the blade consumption level by the light variation each time the blade cuts off the light beam. If water around the flange cover drops onto the OPC prism, it can cause incorrect reading. When using OPC, use high-pressure air (prism air H) to blow out the water first, then low-pressure air (prism air L) continues blow until the procesure completed to prevent water drops onto the prism. During the use of the OPC, if error messages such as “Lighting level is not stable” or “Cannot determine cutter set position” appears repeatedly, adjust air pressure for the OPC blow air using the valve in the front of the machine. Although the prism is designed to maintain cleanliness using the water spraying system, it is recommended to be cleaned with a cotton swap dipped in the ethanol on a regular bases. If this dose not clean it The prism completely, check the water flow level and the nozzle direction.

water flow can be adjusted by the needle valve in the lower valve unit.

Prism Blow Nozzle (inside) Prism Water Nozzle (outside)

2-43 43

 A-WD-200T

Chapter2  Chapter2 Configuration and Calibration

2-4 2-4-8 Spinner • Configuration and Dri ve Units Arrangement
Refer to the following for spinner unit driver functions. Table rotational drive: AC servo motor Table up and down movement: Air cylinder Cleaning arm: Stepping motor Dry nozzle arm: Air cylinder

During maintenance mode, the spinner table can move up and down freely regardless of the positions of cleaning and drying nozzles. of the way of the table movement. Before move table up and down, verify all nozzles are at the home positions and are out

Cleaning Nozzle (Low Pressure / High 洗浄ノズル Pressure / Rinsing) (低圧/高圧/リンス)

Drying Nozzle

Spinner Cleaning Nozzle and Drying Nozzle

2-44 44

 A-WD-200T

Chapter2  Chapter2 Configuration and Calibration

Spinner Up & Down Cylinder (With 2 position sensors )

Spinner Servo Motor Driver

Spinner Table Up/Down Cylinder and Spinner Motor Driver (Without the right cover and internal protection cover)

Cleaning Arm Stepping Motor

Stepping Motor for Spinner Cleaning Arm Drive (Backside of the Machine)

2-45 45

 A-WD-200T

Chapter2  Chapter2 Configuration and Calibration

Drying Nozzle Cylinder

Cylinder Sensor

Nozzle Cylinder Speed Controller

Drying Air Flow Control Valve Drying Air (N2) Pipe Back Side Drying Air Flow Control Valve High Pressure Water Pipe

Rinse Water Pipe

Drying Nozzle Driver and Piping (Backside of the Machine)

Spinner Table Vacuum Sensor (in the circle)

2-46 46

 A-WD-200T

Chapter2  Chapter2 Configuration and Calibration

2-4 2-4-9 Revolving Arm
The cover of the revolving arm can only be removed at the position shown in the figure below. The arm can be rotated by hand while the power is OFF, When

however, it can only turn clockwise 360° from the initial position. where service work can be performed. hand if necessary.

servicing the arm, rotate the arm to the position while the power is ON, Turn OFF the power, move it by

Caution:

Rotating the arm counter clockwise, or rotating more than 360°

can cause damage to the piping and wiring inside of the rotation axis cover.

• Removing Cover
At a position where the revolving arm is easy to access to, loosen (but do not remove completely) the 7 screws from the side of the cover. Move the arm to the position shown in the figure below, lift up the cover to remove.

Position at Which the Revolving Arm Cover can be Remove

2-47 47

 A-WD-200T

Chapter2  Chapter2 Configuration and Calibration

• Arm Movement Drive Mechanism and Sensors
Cylinder Sensors Arm expansion : 4 Arm up and down : 4

Arm Expansion Cylinder
Cylinder Drive Valve Left: Stain arm UP/DOWN Middle: Arm Expansion Right: Clean Arm UP/DOWN

Clean Arm UP/DOWN Cylinder

Stain Arm UP/DOWN Cylinder

2-48 48

 A-WD-200T

Chapter2  Chapter2 Configuration and Calibration

• Arm Revolving Mecha nism and Sensors
Arm Drive Stepping Motor

Above:

Drive Mechanism Stepping motor encoder (Slit disk + Photo sensor) Revolving arm origin sensor (photo sensor) and sensor flag disk

Down left: Down right:

2-49 49

 A-WD-200T

Chapter2  Chapter2 Configuration and Calibration

• Replacement of Vacuu m Pad
Replace damaged vacuum pad. Remove the stopper screw on the tip of the arm, pull off the vacuum pad holders to remove the screw inside of the pad. tighten the screw. Replace the pad and

Stopper Screw

Pad Screw

2-50 50

 A-WD-200T

Chapter2  Chapter2 Configuration and Calibration

• Replacement of

Vacuum Unit Filter

When no damage is found on the vacuum pads and yet the revolving arm vacuum is weak, it is probably because the filter is dirty, in this case, replace the filter. The other possibility is that the tubes may be damaged.

Revolving Arm Vacuum Unit

Vacuum Unit Filter

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Chapter2  Chapter2 Configuration and Calibration

2-4 2-4-10 Elevator • Configuration
Elevator Axis Drive Motor (with Built-in Brake) Elevator Axis Origin Sensor (Backside) Finger Drive Motor Finger Axis Origin Sensor (Backside)

Finger Unit

Frame Sensor Pre-alignment Wafer Sensor

Pre-alignment stage

エレベータモータ Origin Elevator Axis Sensor (Photo Sensor)

Finger Axis Origin Sensor (Photo Sensor) Elevator Drive Stepping Motor and Origin Sensor (Back view of the Machine)

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Chapter2  Chapter2 Configuration and Calibration

Elevator Axis Encoder (Slit Disk + Photo Sensor)

Frame Guide Drive Cylinder / Speed Controller

Frame Sensor Amp

Cylinder Drive Valve Up: Finger Down: Frame Guide

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Chapter2  Chapter2 Configuration and Calibration

• Replacement of Finge r Drive Timing Belt
To remove the Finger Drive Timing Belt, first remove the timing belt clamping block at first, loosen the screw of the finger motor bracket and move the motor and the bracket to cassette side. pulleys. After installation of the belt, adjust the belt tension to 10mm or less with 100g weight in the center between both

Finger Chuck Drive Cylinder

Timing Belt Clamping Block Finger Axis Encoder (Slit disk + Photo sensor) Finger Axis Drive Motor

Motor Bracket Fixing Screw (4 locations)

Timing Belt for Finger Axis Drive

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Chapter 2 Configuration and Calibration  

2-4-11 Cassette • Cassette 1~3 Door Se nsors and Locks
Refer below for the locations of the door sensors and locks. Door Sensor (CST1, 2) (Proximity Sensor)

Door Lock (Solenoid Cylinder)

Cassette 1, 2 Door Sensors and Locks

Door Sensor (CST3) (Proximity Sensor)

Door Lock (CST3) (Solenoid Cylinder)

Cassette 3 Door Sensor and Lock

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Chapter 2 Configuration and Calibration  

• Frame Stopper Bar
The stopper bar is installed on every cassette to prevent the frame from extending out at the cassette. The bar is driven by a rod less cylinder. If the bar is not operating smoothly, check if the bar is bent or if there is any abnormality in the cylinder drive air piping. Cylinder Drive Valve Frame Stopper Bar

Speed Controller (2 locations)

Frame Stopper Bar Drive Cylinder

Frame Stopper Bar (Viewed from the elevator)

シリンダセンサ

Drive Cylinder and Cylinder Sensor (Viewed from Cassette) 1 Location at Bar Closed Position

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Chapter 2 Configuration and Calibration  

• Inspection Tray
Remove the pre-load stage to access inspection tray for maintenance service work. sensor wiring.
Pre-load Wafer Sensor

Precaution must be taken not to cut the pre-load wafer

Top View of the Pre-Load Unit

Inspection Tray Wafer Sensor Tray Lock Drive Valve

Obstacle Sensor Reflector Inspection Frame Lock / Drive Cylinder

Inspection Tray Lock (Air Cylinder)

Inspection Tray Frame Lock Drive Valve

Pre-Load without the Top Panel

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Chapter 2 Configuration and Calibration  

Inspection Tray Base Sensor (Photo Sensor)

Inspection Base Sensor (Sensor Flag)

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Chapter 2 Configuration and Calibration  

• Cassette Sensor / Sen sor Flag
If the machine does not recognize the cassette, first check if the cassette is set up correctly. The sensor will not sense the sensor flag if the cassette If the cassette sensor does not push the detection lever all the way down.

seems to be out of order, pull out the cassette tray, insert a piece of paper instead of the flag to test the sensor operation (the LED should lit when the sensor is ON).
Cassette Sensor (Photo Sensor)

Cassette Detection Lever

Cassette Detection Lever

Sensor Flag

Cassette Detection Mechanism (Sensor / Sensor Flag)
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Chapter 2 Configuration and Calibration  

• Frame Obstacle Senso r Adjustment
This sensor monitors the frame in the cassette detect frame or obstacles blocking elevator movement. The sensor is installed on bottom plate of Precaution must loader unit, which is structured with the reflection mirror placed at the light projection, interception areas at edge of pre-load stage. incorrect, it can cause of incorrect sensing. The amplifier number indicates the light intensity detection, the larger the number the higher light intensity detected. If the sensor detects objects without an obstacle existing, adjust the light intensity, interception areas and the mirror to maximize the amplifier light reception level (2000 or greater is set at the factory). be taken not to hit anything by the sensor, because if the lighting axis is

Frame Obstacle Sensor (Light projection, reception)

Frame Obstacle Sensor Amp.

Frame Sensor and Sensor Amp Area (bottom of the loader)

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Chapter 2 Configuration and Calibration  

2-4-12 Calibration • Cutting Station Calibr ation (Maintenance Diagnoses Mode)
Cutting Station Calibration (Page 1)
Item [Operation Buttons] Description

The X-Y coordinate for the center of the cutting table should be the camera X-Y center position. Move the X-Y center, adjust Rotation Center Calibration focus on the cutting table or the wafer surface, and switch between CHs. If the revolving center is off from the cross line, [Table Center use the axis maneuver key to align the two. Compensation] Caution: Large discrepancy can cause frequent alignment error. Focus Position Calibration [Focus Compensation] Theta axis CH1 position [CH1 Theta pos. compensation] The camera should be focused on the cutting table surface. Clear the cutting table and adjust the X-Y center position in accordance to the instruction displayed. Adjust the angle according to Theta axis position of CH1. The frame clamper should be parallel to the X-axis and Y-axis. Adjust if it is positioned incorrectly. Adjust the camera image vision center discrepancy at both high and low magnification. Load a patterned wafer on the cutting table, align the cross points of the street to the center of the image at high magnification, when switch to low magnification, the center should not change. The adjustment should be made each time the camera is adjusted. Adjusted before Shipping from the factory. [Y Pixel Register] [XY Center] The X-axis and Y-axis move to bring the camera to the center of the cutting table.

Camera High/Low Magnification Calibration [Mag. Compensation]

[X Pixel Register]

Cutting Station Calibration (Page 2)
Item [Operation Buttons] [Spindle pos. Compensation] [Y1 scale compensation]
[Y1 map measuring] [Y2 map measuring] [Camera map measuring]

Description Adjust the off set between the spindle (blade) position and the camera. Only TSK Service Engineers are authorized to perform the adjustment.

Adjusted at the factory prior to delivery.

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Chapter 2 Configuration and Calibration  

• Blade Calibration (Set Up Mode)
Item [Operation Buttons] Description The X and Y-axis coordinates when performing optical cutter set are determined by teaching position. Use the axis maneuver key displayed to move the X and Y-axis and bring the lowest part of the blade to the center of the OPC unit. Lower the Z-axis to the position that blade never contact with OPC prism to be convenient for teaching the position. The Z axis movement when performing optical cutter set is determined by teaching position. The adjustment can be made from the position adjustment tab screen and the adjustment tab screen. Using the axis maneuver key, lower the Z axis, set the Z coordinate 1mm lower from the point that is 10% of the bar graph value. Important: Use a new blade with the outer diameter set by the blade tester for the adjustment. When performing contact cutter set, same as the optical cutter set, the X and Y-axis coordinates are set up by teaching. The X and Y-axis coordinates are set up in the position where the lowest part of the blade is contacting the metal part of the cutting table when Z-axis is lowered to its position. The adjustment method is the same as the optical cutter set. Automatically calculate the height difference between cutting table and OPC unit by performing contact and optical cutter set. This function must be performed when cutting table has been replaced, but it is automatically performed after frame size conversion had been done in specified mode. The height (Z axis coordinate) of the cutting table surface is adjusted automatically. Important: Use a new blade with the outer diameter set by the blade tester for the adjustment.

Optical Cutter Set Position Adjustment [OPC pos. teaching]

Optical Cutter Set Lower Limit Adjustment [OPC down limit teaching]

Contact Cutter Set Position Adjustment [Contact C-set pos. teaching]

[Calibration of contact and optical]

[Table height compensation]

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Chapter 2 Configuration and Calibration  

• Handling Station Calib ration (Maintenance Diagnosis Mode)
Handling Station Calibration (Page 1)
Item [Operation Buttons] Description The elevator axis reference positions (load/Unload, inspection and the first slot of cassette 1~3) are set by teaching. Use the cassette that frame is set in the 1st slot of it to teach each reference positions. Load/unload position should be set in the position where the revolving arm (clean arm) vacuum pads are fully depressed against the frame. When setting the inspection position, in order for the frame in the inspection tray to be pulled out smoothly, be sure to place the pre-alignment frame guide surface slightly under the inspection frame guide surface (the position may vary by the type of frame used). Cassette 1~3 should be set in the same manner as the inspection position. After setting the reference position, set the offset position for the frame sensor. The frame sensor optical beam should be set in the center of the 1st slot frame as frame sensor off set. Refer to the guide message displayed for position settings. Adjust the finger position for draw out frame from cassette. Set the frame in the cassette, and make sure that the frame clamping device of finger axis can be clamped firmly. The center of the finger should be set at where the revolving arm picks up the frame in the pre-alignment area. This position affects positioning of frame handling positions on both cutting and spinner table. Adjust the revolving coordinate of the revolving arm. The adjustment must be made with caution to avoid error when it moves frames from one section to another. The spinner cleaning area should be set in the center of the spinner table as the reference position. Use the axis maneuver key to align the nozzle to the revolving center of the spinner table. Initialize all units of the handling station or the machine.

Elevator Reference Position Compensation [Elevator pos. compensation]

[Finger acting pos. Compensation]

[Finger center compensation ]

[Rev. arm compensation ]

[Water nozzle center compensation] [Handling station initialize] [Machine initialize]

Handling Station Calibration (Page 2)
[--------- initialize] Each area in the name of button is initialized individually.

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Chapter 3 Periodic Maintenance Service List

 A-WD-200T

Chapter 3 Periodic Maintenance Service List

3-1 Periodical Main tenance
Periodical Maintenance is extremely important in terms of maintaining performance integrity of the machine and for safe operation. We strongly recommend our customers to follow the schedule specified in this chapter for periodical maintenance.

IMPORTANT
Customer should perform maintenance periodically in accordance with the Maintenance List specified in this chapter. We also recommend overall maintenance once a year or two years performed by TSK personnel (with a fee).

WARNING
Unless authorized, DO NOT perform any type of maintenance work on items marked with a symbol as shown on the left. [Example] < This indicates that personnel at operation level are not allowed to perform maintenance work on this item.

3-1

 A-WD-200T

Chapter 3 Periodic Maintenance Service List

3-2 Recommended Periodical Maintenance List
Refer to the Periodic Maintenance List below for this machine.

* Danger Classification indicates the type of the danger potential during
maintenance work.

Daily Check List
Check List Check Method Remarks Worker Class Hazard Class When it is lower than Check the air pressure 0.5Mpa, adjust it with the Verify Air gauge in front and regulator in the back in Pressure back of the machine. accordance with Chapter “4-1-1” The water flow should be at Check the flow gauge the specified level and Verify The Cutter Water in the front while sprayed evenly from the water is running. Flow nozzles. Refer to Chapter “4-1-2”. Water Leakage Check to see if there is Check the pipe joints. Refer Around The water leaks around the to Chapter “4-1-3”. Machine machine
Cleaning of Xaxial bellows

Remove wafer scraps.

Refer to Chapter “4-1-4”.

Monthly Check List
Check List Verify Each Nozzle Check Method Check spinner nozzle stroke table stop Remarks Refer to Chapter “4-2-1” Worker Class Hazard Class

Spinner Table Verify the Position position

origin Refer to Chapter “4-2-2”

Spinner Table The up/down movement should Refer to Chapter Up/Down be smooth “4-2-2” Movement After X/Y movement, the discrepancy between the + Refer to Chapter Revolving electron line in the center of the “4-2-3” Center screen and the revolving center should be less than ±20µm
Cleaning of oil pan

Remove the X axis bellows, wash Refer to Chapter off the wafer scraps in the oil pan. “4-2-4”

3-2

 A-WD-200T

Chapter 3 Periodic Maintenance Service List

Monthly Check List
Check List Check Method Remarks Worker Class Hazard Class coordinate value Read coordinate value The be of the F axis when should Focus focused on the table 0.000mm±10µm max.. surface Refer to Chapter “4-3-1” Should be ±1.5mm or less Verify the arm position Revolving Arm from the center of the when it transfers the Precision cutting table/spinner table. frame to the table Refer to Chapter “4-3-2” Use the electrical and 0.002mm maximum. Thrust direction micrometer runout of flange measure from the face Refer to Chapter “5-2-9”. of the flange Water Leakage Open the cover and X axis guide area. from the Inside verify water leakage Refer to Chapter “4-3-4” of the Machine Clean with DI water using devices such as ultrasonic cleaning See 3-3-5. Cleaning Table device. Let it dry thoroughly after cleaning. Measure the planarity of the Refer to Chapter “5-2-3” wafer table Test Y Axis Feed Use a wafer to test Precision Verify Frame Vacuum Pad Revolving arm pad Refer to Chapter “4-3-7” There should be no cracking on the surface. Refer to Chapter “4-3-8”

3 Months Check List
Check List Check Method Remarks Refer to Chapter “4-4-1” Worker Class Hazard Class Verify Y Axis Linear Scale Litharge Oscilloscope Wave Cleaning X Axis Guide

Verify that there is no Use alcohol to clean damages at the same time. the X axis area Refer to Chapter “4-4-2” Verify the Off Set of The position should be the Microscope the same for high and Refer to Chapter “4-4-3” Magnification low magnification

3-3

 A-WD-200T

Chapter 3 Periodic Maintenance Service List

6 Months Check List
Check List Verify the Electrical Leakage Breaker Grease the Y Axis Guide and Ball Screw Grease the Z Axis Guide and Ball Screw Grease the Elevator Axis Guide and Ball Screw Check Method Remarks Worker Class Hazard Class

Press test button to Refer to Chapter test its function “4-5-1” Refer to Chapter “4-9” Refer to Chapter “4-9” Refer to Chapter “4-9”

Yearly Check List
Check List Measure X Axis Straightness (Vertically) Measure the of the X Axis Straightness (Horizontally) Verify the perpendicularity of Spindle and the X Axis Measure Z Axis Repeatability Measure the runout of Spindle Shaft (radial direction) Spindle Brush Check Up Replace Air Filter Element Check Method Remarks Refer to Chapter “52-1” Refer to Chapter “52-2” Refer to Chapter “52-8” Refer to Chapter “52-5” Refer to Chapter “52-7” Refer to Chapter “24-5” Refer to Chapter “46-6” Worker Class Hazard Class

3-4

 A-WD-200T

Chapter 3 Periodic Maintenance Service List

Replacement Parts, Service and Calibration As Needed
Check List Replace Blade Check Method Operation Remarks Refer to Operation Manual Chapter “7-4” Refer to Operation Manual Chapter “7-5” Refer to Operation Manual Chapter “7-6” Refer to Chapter “4-7” Worker Class Hazard Class

Cutter set

Operation

Replace Table

Maintenance

Blade calibration Calibration Replace Maintenance Microscope Lamp Dress work

Refer to Chapter “4-8” Refer to Operation Manual Chapter “7-7”

3-5

Chapter 4
Maintenance And Check List

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-1 Daily Check Li st
4-1-1 Verify Air Pressure
Air pressure gauge

Verify that both air pressure gauges in the front and the back of the machine indicating that the air pressure is at 0.5Mpa.

If the air pressure value is incorrect, remove the panel and adjust it from the regulators.

X-axis / spindle air pressure gauge

Conventional air pressure gauge for others

4-1

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-1-2 Verify Cooling, Cut ting And Cleaning Water Flow
Verify the spindle cooling, cutting and cleaning water flow from the flow meter in the front of the machine.

Spindle1 Cooling (F)/(R), Cutting, Cleaning

Cooling (F)/(R), Cutting, Cleaning Spindle2

4-2

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-1-3 Water leakage arou nd the Machine
Verify that there is no water leakage on the floor under or around machine.

There

should

be

NO water leakage !

4-3

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-1-4 Cleaning the X Axi s Bellows
Clean up the cutting scraps from wafers and other foreign materials.

X-axis bellows

4-4

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-2 Weekly Check List
4-2-1 Verify the Nozzles
To inspect the nozzles, release the cover interlock (refer to Chapter 2-3-2) to open the loader cover for better visibility.

• Nozzles in spindle sec tion

Select MAINTENANCE DIAG. From “Miantenance menu screen” and then Cutting station I/O from the Diag. menu.

Switch “ON” the cutting water ON/OFF , water and SP? Blade coolant 1 and 2 and “ON/OFF” to verify wafer flow, nozzle angle and clogging, etc.

Blade cooling water nozzle 2 Blade cooling water nozzle 1 Cutting water nozzle Contamination cleaning water nozzle

4-5

 A-WD-200T

Chapter 4 Maintenance And Check List  

• Spinner nozzle

Select PREPRATION DIAG.

and

then

Handling station drive from the “Maintenance menu screen”

Switch “ON” Spinner Hi water ON/OFF, Spinner Lo. Water ON/OFF, and Spinner rinse ON/OFF.

Rinse nozzle High pressure cleaning nozzle Low pressure cleaning nozzle (option)

Verify that the water flow and angles of

the

nozzles are appropriate and it is not clogged.

4-6

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-2-2 Spinner Table Che ck

Select PREPARATION DIAG. and then Handling station drive menu screen” from “maintenance

Press the

Spinner initialize button, and

verify that the table origin position is correct and that the table up/down movement is smooth.

Spinner table

4-7

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-2-3 Cutting Table rotat ion center check
Press the Short cut SW button on “AUTO STOP STATE” screen.

Press Move XY axis to center.

Cutting table and microscope moves against to center of Cutting table. Adjust the lighting and focus on the table surface. If the table surface is difficult to see with the “Coaxial”, switch the lighting to “Ring” and adjust to the

Coaxial

Ring

right brightness.

4-8

 A-WD-200T

Chapter 4 Maintenance And Check List  

Adjust the focus while looking at the screen.

Rotate cutting tabble using channel switching button, CH1 or CH2 .

CH1

CH2

Verify that the rotatoin center of the cutting Table center Compemsation table is aligned with the center of the camera image, displayed by cross mark of hair line in the center of image display area.

If they are not aligned: Move the X, Y axis to align with the center of camera image, from the Cutting station calibration function in “Maint. Diag”, and update the calibration value using the Table center Compemsation button.

4-9

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-2-4 Cleaning Oil Pan
Remove panel from left side surface of AWD-200T body.
Cover

X-axis bellows

Remove the oil pan cover.

Remove the X axis bellows and push it back

The oil pan is structured in two layers. Remove both layers and wash it thoroughly.

4-10

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-3 Monthly Check List
4-3-1 Focus
Select MAINTENANCE DIAG. from “Maintenance screen”.

Press Cutting station calibration.

Focus on cutting table using “FOCUS” arrow keys.

Verify that the F axis coordinate value is ±0.0100mm max. from 0.0000mm.

F-axis coordinate value

4-11

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-3-2 Revolving Arm Pre cision
Set the frame in the cassette or the inspection tray. Press “Manual Load”

form “Short cut menu” screen to transfer the frame to the cutting table.

Verify that the frame is in the center of the table, and that the space between the table
Frame

outer rim and the frame inner rim are roughly the same all around.

In the same manner, press the “Manual Unload” from “Short cut menu” screen to transfer the frame onto the spinner table, and verify that the frame is centered between the four spinner table guide arms..

4-12

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-3-3 Flange surface thru st direction runout
Blade surface attaching

Remove the blade from the flange.

Place the electrical micrometer detecting
Electric micrometer

element to blade attaching surface of the flange.

Rotate the flange by hand, and verify that the meter value is 0.002mm (peak to peak) or less.

(See Chapter 5 Accuracy for details)

4-13

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-3-4 Water Leakage from the Machine
Remove the cover, verify and make sure that there is no water leakage around the X axis guide.

X-axis guide

4-14

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-3-5 Cleaning the Table s
Remove cutting and the spinner tables. (Refer to the Operation Manual, Chapter “7Porous part (ceramic)

6: Replacing Table and Size Conversion” removal of the tables).

Wash the tables with DI water using ultrasonic cleaning device, etc. Pay special attention to the porous (ceramic part), because it can affect the vacuum if it is not clean.

After cleaning, let it dry thoroughly before reinstall.

4-15

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-3-6 Wafer Table

Plana rity Measurement

Refer to Chapter 5 “Accuracy”.

4-16

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-3-7 Y Axis Feed Preci sion

Axis Speed Button I: Index feed

Load dummy wafer (with pattern) on the cutting table, perform alignment manually or automatically. Align the edge of the pattern

or street to the screen hair line.

Set “XY key” for

I

to perform index feed

from the “Operation (Manual Operation)” screen.

Use the up/down (Y axis) arrow to perform Y1 axis index feed. Verify and make sure

that the wafer pattern and the hairline are still aligned.

4-17

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-3-8 Frame Vacuum Pad
Verify that there are no cracks on the revolving arm vacuum pad.

Suction pad

4-18

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-4 3 Months Chec k List
4-4-1 Y Axis Linear Scale Lissajou Wave

Notes
The use of the oscilloscope is required for verifying the Litharge Wave. Please be aware that there is a risk of damaging the board according to the device used. If problems should occur which require Litharge Wave inspections other than regular scheduled inspections, contact TSK.

4-19

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-4-2 Cleaning X Axis Gu ide Area
Remove the X axis bellows and clean the guide area with alcohol, at the same time, verify its condition.

4-20

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-4-3 Camera Magnifica tion Offset

Hi.mag

Low.mag

Load dummy wafer to the cutting table, adjust the lighting and focus. For better

visibility, align the screen hairlines cross to the street cross.

Select “Maintenance Diag.” from the “Maintenance Screen” and then select “Cutting station Calibration”.

Switch between high and low magnifications and make sure that the hairline cross is stay on the same point that aligned by above procedure.

If it is not aligned, press the “Camera High/Low Magnification Calibration” to adjust the position and press “Enter”. 4-21

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-5 6 Months Chec k List
4-5-1 Current Leakage B reaker Operation
Press the Current Leakage Breaker Test button to test operation.

Test button

4-22

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-5-2 Greasing to the Y A xis Guide/Ball Screw
* Refer to Chapter 4-9.

4-5-3 Greasing to the Z A xis Guide/Ball Screw
* Refer to Chapter 4-9.

4-5-4 Greasing to the Elev ator Axis Guide/Ball Screw
* Refer to Chapter 4-9.

4-23

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-6 Yearly Check L ist
4-6-1 X Axis Straightnes s (Vertically)
Refer to Chapter 5 “Accuracy”.

4-6-2 X Axis Straightnes s (Horizontally)
Refer to Chapter 5 “Accuracy”.

4-6-3 Spindle Axis & X A xis Perpendicularity
Refer to Chapter 5 “Accuracy”.

4-6-4 Z Axis Precision R epeatability Measurement
Refer to Chapter 5 “Accuracy”.

4-6-5 Spindle Run Out M easurement (Radial Direction)
Refer to Chapter 5 “Accuracy”.

4-24

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-6-6 Replacement of the Air Filter Element
Remove the panel in the back and replace the filter. F300-2F Filter Element MMF150 Filter Element

Air filters

4-25

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-7 Blade Calibrati on

Switch to “Setup menu screen”.

Select Blade calibration. Following calibrations are able to perform from this mode.

Optical Cutter Set Position Teaching : Adjust the X and Y positions for optical cutter set. Optical Cutter Set Down Limit Teaching : Adjust the lower Z axis limit for optical cutter.set. Contact Cutter Set Position Teaching : Adjust the X and Y positions for contact cutter set. Automatic Contact and Optical Height Calibration : Re-measure and update the calibration value for the height of the contact and optical cutter set. Table Height Compensation : Blade that has a clearly defined diameter must be attached. Automatic calibration will

be done by performing contact cutter set, re-measure and update the table height calibration value.

4-26

 A-WD-200T

Chapter 4 Maintenance And Check List  

Adjust the positions using the teaching buttons on the axis arrow button and the function panel field.

4-27

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-8 Replace Came ra Lamp
Always replace with new lamp.

WARNING
Do not touch the halogen lamp on the camera during or immediately after shutting down the power. Wait for the surface temperature to cool down below 50°C before starting ° replacement.

IMPORTANT
Do not touch the lamp with bare hand, hand oil on the glass can reduce the amount of lighting.

Microscope lamp

4-28

 A-WD-200T

Chapter 4 Maintenance And Check List  

4-9 Greasing
• Grease to the Y axis G uide and Ball Screw
Open the panel on top of the Y-axis. Use the grease gun and inject Grease into the grease nipples on the Y1 and Y2 sliders 2 or 3 times. This will Grease both the Y-axis guide and ball screw at the same time.

Grease gun Grease nipple

4-29

 A-WD-200T

Chapter 4 Maintenance And Check List  

• Grease to the Z-axis a nd Ball Screw
Open the covers for Z-axis 1 and Z-axis 2. Use grease gun to inject grease a few times into grease nipples for both guide and ball screw located on driving section for both Z1 and Z2-axis.

Grease nipple for Ball screw

Grease nipple for slide guide

4-30

 A-WD-200T

Chapter 4 Maintenance And Check List  

• Grease to the Elevator Guide and Ball Screw
Remove panel from back side of elevator section. Use grease gun to inject grease few times into grease nipples for guide located on back side. Directly apply appropriate amount of grease to ball screw.

Ball screw

Grease nipple for slide guide

4-31

Chapter 5 Accuracy

 A-WD-200T

Chapter 5 Accuracy  

The machine accuracy should be measured in a regular basis in order to take full advantage of its ability for stabilized and highly accurate cutting results.

CAUTION
When accuracy is measured, there should be air supplyed to the machine.

CAUTION
When accuracy is measured, set the axis to the lowest speed.

CAUTION
When adjusting straightness between the X axis and the stretch, set the stretch within measurement area.

CAUTION
Secure the cables of the detection devices so it does not get in the way of the measuring process.

5-1

 A-WD-200T

Chapter 5 Accuracy  

5-1 Precision Toler ance
Checking List 1 2 3 4 5 6 7 8 9 10 X-axis straightness (horizontally) X-axis straightness (vertically) Wafer table planarity Y-axis index accuracy Z-axis repeatability Spindle axis perpendicularity against X-axis Spindle run out (radial direction) Spindle run out (axial direction) Flange end surface run out Dynamic accuracy Tolerance 0.0015/210 0.0015/210 0.004/φ125 0.005/φ150 0.007/φ200 0.002/210 0.002 0.005/150 0.002 0.002 0.003 - Remarks Reciprocate measurement at spindle position Reciprocate measurement at spindle position 5” 6” 8” 20 times

- Unit : mm

5-2

 A-WD-200T

Chapter 5 Accuracy  

5-2 Precision Insp ection
5-2-1 X-axis Straightness (Horizontally)

Jig Stretch

Spindle

[Top View]

Detector

Circular table

[Side View]

Remove flange and flange cover from spindle, use the bar shown in above figure to set the detection device.

Set the stretch parallel to the X axis on top of the circular table. Place the electrical micrometer detection device on the stretch side face, and measure the maximum inconsistency of the X axis movement.

Measure the X axis reciprocate in addition to the return inaccuracy.

5-3

 A-WD-200T

Chapter 5 Accuracy  

5-2-2 X-axis Straightness (Verticaliy)

Jig Spindle Stretch

[Top View]

Detector

Circular table

[Side View]

Remove flange and flange cover from spindle, use the bar shown in above figure to set the detection device.

Set the stretch parallel to the X-axis on top of the circular table. Place the electrical micrometer detection device on the stretch top face, and measure the maximum inconsistency of the X axis movement.

Measure the X axis reciprocate in addition to the return inaccuracy.

5-4

 A-WD-200T

Chapter 5 Accuracy  

5-2-3 Wafer Table Planar ity

Measurement points

[Top View]

Measurement points

Set the detection device on the spindle in the same manner as when measuring the X axis straightness (vertically).

Place the detection device on the wafer table. Take the measurement of the maximum inconsistency value of the X and Y axis movement.

5-5

 A-WD-200T

Chapter 5 Accuracy  

5-2-4 Y-axis Index Precis ion
Load the wafer to the table.

Align wafer in accordance with the manual..

Set the index data on the Device Parameter.

Align with the pattern reference position in the front of the wafer manually.

Use 0-Clear key to set the Y axis indicator to 0.

Feed Y-axis by index to measure and plot the discrepancy.

If the inaccuracy value is a straight line, it can be corrected by ADJ.

5-6

 A-WD-200T

Chapter 5 Accuracy  

5-2-5 Z-axis Repeatabilit y

Jig Spindle

[Side view]

Detector Stretch

Set the detection device as shown in the figure above, and set the stretch on top of the wafer table (or on the circular table).

Place the detection device on the stretch and set this point to 0.

Move the Z axis up and down using 1mm UP(DOWN) key and measure the inconsistency (repeat 20 times).

5-7

 A-WD-200T

Chapter 5 Accuracy  

5-2-6 Spindle Axis Perpe ndicularity Against X-axis

Spindle Holder Detector

[Top view]
Nut

Stretch

[Side view]

Attach the jig (holder) to spindle shaft and set the detection device as shown in the figure above.

Set the stretch on top of the wafer table (or the circular table) parallel to the X-axis.

Place the detection device on the stretch, rotate the spindle by hand as shown in above. Take the measurement of the

maximum inconsistency value.

5-8

 A-WD-200T

Chapter 5 Accuracy  

5-2-7 Spindle Run Out (R adial Direction)
Fixing plate Spindle

Detector

Jig

[Top view]

Vacuum secure the fixing board on top of the wafer table (or circular table), install the detection device as shown in the figure above.

Place the detection device on taper area of the spindle shaft and rotate it by hand, take the measurement of the maximum inconsistency value.

5-9

 A-WD-200T

Chapter 5 Accuracy  

5-2-8 Spindle Run Out (T hrust Direction)
Jig Fixing plate Spindle Detector

Steel ball holder Steel ball

[Top view]

Set steel ball to tip of spindle shaft with the steel ball holder as shown in the figure above.

Vacuum secure the fixing board on top of the wafer table (or circular table), install the detection device as shown in the figure above

Place the detection device on tip of steel ball and rotate it by hand, take the measurement of the maximum inconsistency value.

5-10

 A-WD-200T

Chapter 5 Accuracy  

5-2-9 Flange End Surfac e Run Out

Jig

Detector

Fixing plate

Spindle

[Top view]

Attach flange to spindle.

Vacuum secure the fixing board on the wafer table and set the detection device as shown in the figure above.

Place the detection device on the blade attaching surface of flange and rotate it by hand, take the measurement of the maximum inconsistency value.

5-11

 A-WD-200T

Chapter 5 Accuracy  

5-2-10 Dynamic Accuracy
Perform dicing with a wafer (dummy wafer can be available) to measure the dynamic accuracy.

Verify cutting accuracy. ・ Y-axis index accuracy (pitch inconsistency). ・ Straightnes of sawn kerf ・ Cutting depth. ・ Chipping ・ Kerf width

5-12

Chapter 6 Troubleshooting

 A-WD-200T

Chapter 6 Troubleshooting  

6-1 Troubleshootin g
Block Problem Phenomenon Checking List Verify the power supply is ± 10% of the specified voltage Verify that the EMO SW is not depressed. EMO Reset SW does not lit when the Main SW is ON No power Verify that the breaker and the circuit protector are not turned OFF (on the left of the machine). Verify there is no water leakage in and out of the machine. Turn OFF the main breaker, wait for a little while and turn it ON again. Power Supply The front panel Power OFF SW lamp does not lit when the EMO Reset SW is depressed. Power ON/OFF lights do not change from OFF to ON. Same as above. Verify if the UPS indicator is in RUN. Verify that the cooling fan is operating. Verify that the breaker and the circuit protector are not OFF. Power turns OFF during operation Verify there is no water leakage in and out of the machine. Turn OFF the main breaker, wait for a while and turn it ON again. Verify that the D-SUB connector underneath of the front panel is connected.

6-1

 A-WD-200T

Chapter 6 Troubleshooting  

Block

Problem

Phenomenon No displays on the touch panel.

Checking List Verify the power is ON. Power LED ON?) (Is the

Verify VGA cable connection. Verify that the PC cables are connected correctly. Verify if the mouse and keyboard are connected (they should not be connected) Verify that the network cable is connected (PC~VME) Verify the RUN_LED of the VME rack slot 1 CPU board is flashing. Verify the FAIL_LED is lit.

Unable to turn ON the PC Only few lines of the message are displayed.

PC

No dicer display

Unable to start up the dicer GUI following the WindowsVerify if the network cable NT conversion transceiver LED is flashing. Turn OFF the machine and restart. After start up the Window-NT, verify that the touch panel driver indicator is working properly.

Touch Panel

No reaction from the touch panel.

Turn OFF the machine and restart. Verify that the cable between the PC COM1 board and the touch panel is connected.

Unable to open the loader cover

Unable to release the cover lock at the specified timing

Verify that the connector for the power control board (HA1118) at the lower left of electrical frame is connected. Verify that the “LOCK” ”UNLOCK” on the right of the cover lock unit is not on “UNLOCK”. Verify that the connector for the power control board (HA1118) at the lower left of the electrical frame is connected. Verify that the lock key is inserted all the way in.

Cover Interlock

Unable to close the loader cover

Unable to close the cover lock at the specified timing

Warning says the cover is open even though it is closed.

Unable to operate the machine.

6-2

 A-WD-200T

Chapter 6 Troubleshooting  

Block

Problem

Phenomenon

Checking List Verify that the UPS indicator is not on ALM.

UPS malfunction

Indicating “UPS” malfunction.

Verify that the connector for the power control board (HA1118) at the lower left of the electrical frame is connected. Detecting input power failure. The machine shuts off automatically, shuts the main breaker and restart again. Cooling fan malfunction inside of the UPS. Verify the error message on the X-axis driver.

UPS The alarm goes off every 3 seconds. UPS alarm Continuous sound of alarm

No motor torque Unable to initialize the X-axis Unable to detect the origin sensor X-axis

Verify power supply to the X-axis driver unit. Verify that the circuit protector CB11 is ON. Verify that the origin sensor on the right side of the X-axis is operating. Verify the wiring is not open. Verify the X-axis driver unit error display.

X-axis servo control failure

Turn off the machine, move the X-axis by hand to see if the movement is smooth. Verify that there are no damages on the X-axis linear scale cable lines.

6-3

 A-WD-200T

Chapter 6 Troubleshooting  

Block

Problem

Phenomenon

Checking List Verify the power supply to the Y axis driver unit (AC 100V). Verify that the circuit protector CB15 (Y1) and CB16 (Y2) are ON. Verify for Y axis driver unit panel indication (TIM or OL) error.

No motor torque

Unable to initialize the Y-axis Unable to detect the origin sensor. Y-axis

Verify that both origin sensors, front (Y1) and rear (Y2) are operating. Verify the wiring. Verify that the fan sensor in the center is operating. Verify its wiring. Verify that the connectors are connected. Verify for Y axis driver unit panel indication (TIM or OL) error. Turn off the machine, move the Y axis manually to see if the movement is smooth. Verify if the linear scale reading board (DIVIDER) connector is connected. Verify power supply (DC 24V) to the Z axis driver unit. Verify that the power LED (green) is lit. Verify that the top origin sensor is operating. Verify the wiring. Turn off the machine, move Zaxis by hand to see if the movement is smooth. (with open Z-axis cover.) Verify that the Z-axis encoder line relay connector is connected. Verify that the cables in Y-axis movable cable section are not damaged.

Y-axis servo control failure

No motor torque Unable to initialize Z-axis Unable to detect the origin sensor Z-axis

Z-axis control failure

6-4

 A-WD-200T

Chapter 6 Troubleshooting  

Block

Problem

Phenomenon

Checking List Verify the power supply (AC100V) to the T-axis driver unit.

No motor torque Unable to initialize the T-axis Unable to detect the origin sensor.

Theta Axis

Verify for error message indication on the 7 segments of the T-axis driver unit panel (normal indication is “0”. Verify that the CW origin sensor is operating. Verify the wiring. Verify that the distance between the sensor flag and the sensor flute is adequate. Verify power supply (DC24V) to the arm axis driver unit. Verify that the CCW sensor is operating. Verify the wiring. origin

No motor torque Unable to initialize the Arm axis Revolving Arm Axis Arm axis control failure Unable to detect the origin sensor

Verify that the encoder signal cables are not damaged. Turn off power supply and move arm axis by hand to see if the movement is smooth. No motor torque (Elevator drops when motor brake is OFF). Unable to initialize elevator axis Verify power supply to the arm axis driver unit (DC24V). The circuit for the cassette area is designed to cut the elevator motor driver pulse when the door sensor is OFF. Verify all of the door sensors are ON. Verify the upper origin sensor is operating. Verify the wiring. Verify that the elevator encoder signal cables are not damaged.

Elevator Axis

Has motor torque but not revolving

Unable to detect the origin sensor. Elevator axis control failure

6-5

 A-WD-200T

Chapter 6 Troubleshooting  

Block

Problem

Phenomenon

Checking List Verify the error message on the spinner driver unit.

Spinner

Unable to initialize the spinner

No motor torque

Verify power supply for the spinner driver unit (AC100V). Verify that the circuit protector CB17 is ON. Verify that the Up/Down cylinder is operating.

Spinner unable Up/Down No motor torque Unable to initialize finger axis

Verify the power supply to the finger axis driver unit (DC24V) Verify that the rear origin driver unit is operating. Verify the wiring is in good condition. Verify that the finger movement is smooth from/to the cassette. If not, can it be corrected by adjusting the height?

Unable to detect the origin sensor

Finger

Finger axis control failure

Verify to see if the movement is not smooth because of the frame or the cassette is not straight. Verify that the finger axis encoder signal cables are not damaged.

6-6

 A-WD-200T

Chapter 6 Troubleshooting  

Block

Problem

Phenomenon

Checking List Verify power supply to the spindle driver unit (AC100V). Verify that the circuit protector CB13 (S1) and CB14 (S2) are ON. Verify the error message on the 7 segments indicator of the spindle driver unit panel. (“0” is indicated when it is normal.)

No motor torque

Error message for spindle driver. Error code “0”.

Unable to rotate the spindle Spindle Rotation is not stable.

Error message for spindle driver. Error code “2”. Error message for spindle driver. Error code “3”. Error message for spindle driver. Error code “8”. Error message for spindle driver. Error code “A”. Error message for spindle driver. Error code “P”.

The power transistor in the spindle driver unit is over heated. Possibility of spindle driver malfunction. Abnormal output from the spindle rotation detection sensor (Phase A, B). Hole sensor wiring path failure or sensor malfunction. Abnormal power supply (AC100V) to the spindle driver unit. Spindle motor overheated. Verify cooling water supply. Spindle motor overloaded. Verify that the type of cutting performed is not causing overload to the motor. Detected spindle driver over current. Verify that the type of cutting performed is not causing overload to the motor. Abnormal spindle motor rotation. Possibility of abnormal hole sensor output or driver unit malfunction.

Error message for spindle driver. Error code “9”.

6-7

 A-WD-200T

Chapter 6 Troubleshooting  

Block

Problem

Phenomenon

Checking List Water leakage under the cutting table (under the angular cover) Disconnect the green and yellow wires (CT- and TSLD wires) in front of the X carriage, measure the resistance value between the table and the GND (X carriage GND). If it is more than 1MΩ, the cutting table is normal. If it is less than 1MΩ, it means that the resistance value is low due to water leakage. Blow dry under the angular cover. Set the cutting set circuit for checking mode (with the command from the maintenance diag.) If the cutter set signal is OFF , it indicates floating. Verify the green and the yellow wires (CT- and TSLD), in front of the X carriage and see if there is open circuit caused by disconnection of connector. Set the cutter circuit on table circuit checking mode (Maint. Diag. Command), if the cutter set signal is ON, the circuit is OK. Set the cutter set circuit on lock checking mode (Maint. Diag. Command), if the cutter set signal is ON, the circuit is OK. Remove the brush and verify if the brush is damaged. Set the cutter circuit in Lock Checking mode (Maint. Diag. Command), if the cutter signal is OFF, the circuit is OK.

The table is not electrically floated.

The cutting table is grounded.

Contact Cutter Set Table Circuit Checking Error Open circuit.

Spindle brush circuit check error

No contact from the brush between the spindle and the GND

Spindle lock check error

The spindle shaft is contacting the outer tube (normally While supplying air to the insulated by air). spindle, rotate the shaft by hand and see if it will rotate slightly. (Verify that the power is OFF.)

6-8

 A-WD-200T

Chapter 6 Troubleshooting  

Block

Problem

Phenomenon

Checking List Verify if the prism part of optical cutter set unit (prism object surface) is dirty. Verify if the water flow for cleaning prism surface of the unit during cutting process is targeted for the entire object. Verify if the amp output voltage is lower than 7V. Verify if there is water leakage from flange cover on the prism part of optical cutter set unit (prism object surface). Verify if the amp output voltage is lower than 7V.

Plus compensation error. Compensation error.

Excess in positive direction compared to previous height of cutter set.

Cutter set position can not define

Optical cutter set Insufficient initial lighting

Verify if the prism part of optical cutter set unit (prism object surface) is dirty. The initial lighting check was Verify if the water flow for performed under fully cleaning prism surface of the transmitted condition before unit during cutting process is optical cutter set. targeted for the entire object. The checking result was under 6V. Verify if too much water dripping from the flange cover onto the prism part of optical cutter set unit (prism object surface). Verify if water is continuously dripping from the flange cover The initial light value check onto the prism part of optical was performed under fully cutter set unit (prism object transmitted condition before surface). optical cutter set. The checking result indicates Verify there is sufficient air blow that it could not reach to a (Hi air) on the prism surface to stabilized initial light value for blow off water drops. the specified period of time. Verify if the air blow of Lo. air is too strong.

Unstable initial light value

6-9

Chapter 7 Error Messages

 A-WD-200T

Chapter 7 Error Messages  

7-1 Error Message List
Code
[0000] [0001]

Contents
Undefined error. UPS is working.

Countermeasure
Install new error message file. Check power supply, and restart machine. Check power supply, and restart machine. Restart machine.

[0002]

AC-failure detected.

[0003] [0004] [0005]

Emergency stop detected.

Power-off detected.

signal

is See you again.
Check that electrical power for driving units is on. Check the fan motor, and restart again. Reinstall System.

Electrical power for driving units is not detected. Cooling fan failure detected in control unit. System correct. environment is not

[0006]

[0007]

[0008]

Air pressure drop detected.

Check air Machine.

supply;

restart

[0009]

Water leakage detected.

Check machine leakage.

for

internal

[0010]

Spindle cooling water flow rate is under limit. Spindle motor driver failure. Drain overflow. Cover open.

Check cooling water restart Machine.

supply;

[0011] [0012] [0013]

Check spindle driver and spindle. Clean drain tube. Close cover; switch. push START

[0014]

Wafer diameter is bigger than the table diameter. Thickness of wafer with tape exceeds 4 mm.

Perform frame size conversion, or change wafer data. Check wafer data.

[0015]

7-1

 A-WD-200T

Chapter 7 Error Messages  

Code
[0016]

Contents
Index size is bigger than wafer diameter. There is no alignment software. Manual cutting is finished. Stopped by alignment pause mode. Stopped by cutting pause mode. Stopped by inspection pause mode.

Countermeasure
Check wafer data.

[0017] [0018] [0019]

Install the alignment software. Chose next process. Check the alignment position.

[0020] [0021]

Check the cutting position. Check the wafer unloaded to inspection tray. After checking, transfer the wafer to the cassette. Check alignment data, or register new alignment data. Perform kerf check and press START. Press START to restart.

[0022]

Alignment model exceeded.

reject

limit

[0023]

Stopped for manual kerf check.

[0024]

Processing has been stopped by STOP switch. Stopped by unload pause mode. Number of allowable device data files exceeded. Dressing process completed.

[0025] [0026]

Press START to continue. Delete unused device data from HDD. (Wafer data or blade data) Proceed to processing. product wafer

[0027]

[0028]

Dressing wafers cut space is full, blade dressing is not completed. This is not specified cutting channel. Wafer data does not exist.

Prepare next dressing wafer.

[0029]

Retry the operation on specified cutting channel. Create wafer data.

[0030] [0031] [0031]

The word DEFAULT is included in the name of Wafer or Blade data. Determine the cutting position. Determine the cutting position.

Use another word for device name.

[0032] [0033]

Check by Manual alignment. Check by Sub-index.

7-2

 A-WD-200T

Chapter 7 Error Messages  

Code
[0034]

Contents
X/Y axis is out of cutting area.

Countermeasure
Move X/Y axis into the cutting area. Change-over to High mag. and retry. Check sensor position.

[0035]

Rotation center correction has to be performed in High mag. Compensation value is out of range.,4 Autotatic cutter-set has been interrupted by pressing STOP switch.,1 Function not available with this system software. Can't perform the dress cut using production mode. Can't perform the production cut using dress mode. Performing process. spinner cleaning

[0036]

[0037]

Execute cutter-set by manual operation.

[0038]

Re-install new system software.

[0039]

Check parameter setting for the cutting mode in wafer data. Check parameter setting for the cutting mode in wafer data. Operate after spinner cleaning is completed.

[0040]

[0041]

[0042] [0043] [0044] Cutting can not be peformed in this status. Completed single line cut. Cutting parameters satisfied. are not Review the parameter setting. Perform operation in cutting process or after alignment.

[0045] [0046]

[0047]

Perform DRESS cutting.

Production wafer will processed by next START.

be

[0048]

Ready to perform dressing from the cassette. Multiple wafers executed. can't be

Unload the process wafers, and change the cassette. Reset catalog data of cassette 3.

[0049]

[0050]

Process can't be started.

Wait for an enable signal.

7-3

 A-WD-200T

Chapter 7 Error Messages  

Code
[0051] [0052]

Contents
System environment error,4 Inspection enabled. pause process

Countermeasure
Check the system data file. Continue the process after checking the wafer on inspection tray. Parameters between wafers conflict. Check wafer size and multi wafer position parameter. Check the front and rear sensor for shutter. Check the kerf or perform a kerf check function. Check the built-in UPS.

[0053]

Multi-wafer position parameter error.

[0054]

Shutter between camera and spindle will not move. Stopped by kerf check pause mode. Trouble-signal form built-in UPS has been detected. Trouble-signal from external UPS has been detected. Cannot drive cover lock cylinder.

[0056]

[0057]

[0058]

Check the external UPS.

[0059]

Confirm sensor.

cover

lock

cylinder

[0100]

X axis has not initialized.

After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. If this error continues, mechanical or motor driver adjustment is required. If this error continues, mechanical or motor driver adjustment is required. If this error continues, mechanical or motor driver adjustment is required. Operation error parameter setting. or wrong

[0101]

X axis position error.

[0102]

X axis has exceeded its limit sensor.

[0103]

X axis initialization failure.

[0104]

X axis servo motor alarm.

[0105]

X axis In-position signal has not be detected.

[0106]

X axis exceeds its software limit.

7-4

 A-WD-200T

Chapter 7 Error Messages  

Code
[0107]

Contents
Current position of X axis doesn't match encoder pulse number.

Countermeasure
If this error continues, mechanical or motor driver adjustment is required. If repeating, mechanical or motor driver adjustment is required. If this error continues, mechanical or motor driver adjustment is required. If this error continues, mechanical or motor driver adjustment is required. If this error continues, mechanical adjustment is required. If repeating, mechanical or motor driver adjustment is required. If repeating, mechanical or motor driver adjustment is required. Operation error parameter setting. or wrong

[0108]

The interrupt signal of X-axis stopping can't be recieved. Y axis has not initialized.

[0110]

[0111]

Y axis position error.

[0112]

Y axis has exceeded its limit sensor.

[0113]

Y axis initialization failure.

[0114]

Y axis scale alarm.

[0115]

Y axis exceeded its software limit. Y axis closed control error.

[0116]

After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. If repeating, mechanical or motor driver adjustment is required. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch.

[0117]

Current position of Y axis doesn't match encoder pulse number.

[0118]

The interrupt signal of Y axis stopping can't be received. Z axis has not initialized.

[0120]

[0121]

Z axis position error.

7-5

 A-WD-200T

Chapter 7 Error Messages  

Code
[0122]

Contents
Z axis has exceeded its limit sensor.

Countermeasure
After cause of error corrected, machine will initialize by START switch. If this error continues, mechanical or motor driver adjustment is required. Operation error parameter setting. or wrong

[0123]

Z axis initialization failure.

[0124]

Z axis exceeded its software limit. Cutter-set signal for Z axis was not detected. Current position of Z axis doesn't match encoder pulse number.

[0125]

Check the blade diameter, or cutting table. After cause of error corrected, machine will initialize by START switch. Check the limit sensor. If the sensor is OK, move Z axis to OFF status by manual movement. If repeating, mechanical or motor driver adjustment is required. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. If this error continues, mechanical or motor driver adjustment is required. Operation error parameter setting. or wrong

[0126]

[0127]

Z axis limit sensor is ON.

[0128]

The interrupt signal of Z axis stopping can't be received. Theta axis has not initialized.

[0130]

[0131]

Theta axis position error.

[0132]

Theta axis has exceeded its limit sensor.

[0133]

Theta axis initialization failure.

[0134]

Theta axis exceeded its software limit. Current position of Z axis doesn't match encoder pulse number.

[0135]

After cause of error corrected, machine will initialize by START switch. Check the brake sensor.

[0136]

Brake sensor signal for Theta axis was not detected.

7-6

 A-WD-200T

Chapter 7 Error Messages  

Code
[0137]

Contents
Theta axis servo motor alarm.

Countermeasure
If this error continues, mechanical or motor driver adjustment is required. If this error continues, mechanical or motor driver adjustment is required. If repeating, mechanical or motor driver adjustment is required. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. If this error continues, mechanical or motor driver adjustment is required. its Operation error parameter setting. or wrong

[0138]

Theta axis In-position signal was not detected.

[0139]

The interrupt signal of Theta axis stopping can't be received. Finger axis has not initialized.

[0140]

[0141]

Finger axis position error.

[0142]

Finger axis has exceeded its limit sensor.

[0143]

Finger axis initialization failure.

[0144]

Finger axis software limit.

exceeded

[0145]

Current position of Finger axis doesn't match encoder pulse number. Elevator axis has not initialized.

After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. If this error continues, mechanical or motor driver adjustment is required. Operation error parameter setting. or wrong

[0150]

[0151]

Elevator axis position error.

[0152]

Elevator axis has exceeded its limit sensor.

[0153]

Elevator axis initialization failure.

[0154]

Elevator axis software limit.

exceeded

its

7-7

 A-WD-200T
Code
[0155] [0156]

Chapter 7 Error Messages  
Contents Countermeasure
Close the door and restart. Remove the obstacle, and restart machine. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. If this error continues, mechanical or motor driver adjustment is required. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. If this error continues, mechanical or motor driver adjustment is required. After cause of error corrected, machine will initialize by START switch.

Elevator door is open. An obstacle exist between the Elevator and Cassette. Current position of Elevator axis doesn't match encoder pulse number. Spinner axis has not initialized

[0157]

[0160]

[0161]

Spinner axis initialization failure.

[0162]

Spinner axis software limit.

exceeded

its

[0163]

Spinner axis servo motor alarm.

[0164]

Spinner axis In-position signal has not be detected.

[0170]

Revolving arm axis has not initialized

[0171]

Revolving error.

arm

axis

position

[0172]

Revolving arm axis exceeded its limit sensor.

has

[0173]

Revolving arm axis initialization failure.

[0174]

Revolving arm axis exceeded its software limit.

7-8

 A-WD-200T

Chapter 7 Error Messages  

Code
[0175]

Contents
Current position of Revolving arm axis doesn't match encoder pulse number. Initialize handling unit. Water nozzle initialized axis has not

Countermeasure
After cause of error corrected, machine will initialize by START switch.

[0176] [0180]

After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. After cause of error corrected, machine will initialize by START switch. If this error continues, mechanical or motor driver adjustment is required. Operation error parameter setting. or wrong

[0181]

Water nozzle axis position error.

[0182]

Water nozzle axis has exceeded its limit sensor.

[0183]

Water nozzle axis initialization failure.

[0184]

Water nozzle axis exceeded its software limit. Current position of Water nozzle axis doesn't match encoder pulse number. Wafer vacuum error on cutting table. Wafer present on cutting table. Vacuum for Cutting attachment error. table

[0185]

After cause of error corrected, machine will initialize by START switch. Check wafer vacuum sensor. position and

[0200]

[0201] [0202]

Remove the wafer, and restart. Check the mounting. cutting table

[0203]

Malfunction of spindle brush or cutter-set circuit. Malfunction of cutter-set circuit on cutting table. Cutting table is not floating. Cutting table is grounded. Spindles rotation is unstable.

Check the brush wear or the circuit. Check for disconnection in the circuit. Check for short to ground on cutting table. If this error continues, Spindle or Spindle driver must be replaced.

[0204]

[0205]

[0206]

7-9

 A-WD-200T

Chapter 7 Error Messages  

Code
[0207]

Contents
Spindle is locked in rotation hazard. Spinner table vacuum error.

Countermeasure
Re-balance the flange and the blade, and restart. Check wafer vacuum sensor. position/check

[0208]

[0209] [0210]

Wafer present on spinner table. Spinner failure. Spinner failure. Up/Down movement

Remove the wafer, and restart. Check the sensor position or driving unit. Check the sensor position or driving unit. Replace the tube.

[0211]

nozzle

movement

[0212]

Tube of high pressure pump is clogged. Clean arm front/rear movement failure. Stain arm front/rear movement failure. Clean arm Up/Down movement failure. Stain arm Up/Down movement failure.

[0213]

Check the sensor position or driving unit. Check the sensor position or driving unit. Check the sensor position or driving unit. Check the sensor position or driving unit.

[0214]

[0215]

[0216]

[0217]

Clean arm vacuum error.

Check clean arm vacuum components and frame position. Check stain arm vacuum components and frame position. Mechanical required. Mechanical required. adjustment is

[0218]

Stain arm vacuum error.

[0219]

Clean arm error recovery failed.

[0220]

Stain arm error recovery failed.

adjustment

is

[0221]

Movement of wafer frame overhang protection bar failure.

Remove obstacle and check sensor and driving unit.

7-10

 A-WD-200T

Chapter 7 Error Messages  

Code
[0222]

Contents
Lose of vacuum detected on cutting table during cutting process. Lose of vacuum detected on spinner table during spinner cleaning. High pressure pump pressure limit error. low

Countermeasure
Check piping. vacuum sensor and

[0223]

Check piping.

vacuum

sensor

and

[0224]

Check the high pressure pump and pressure sensor. Check the rinse water flow rate and sensor. Check the D.I. water flow rate and sensor. Check wafer vacuum sensor. position and

[0225]

Rinse water flow rate low limit error. D.I. water flow rate low limit error.

[0226]

[0227]

Wafer vacuum error on cutting table. Manual alignment required. Alignment model does not exist in wafer data. This alignment model is not available. Camera X/Y axis is out of alignment area. System error 1 has occurred in Vision system.

[0300] [0301]

Perform Manual alignment. Perform alignment registration. model

[0302]

Create new wafer data since reregistration is impossible. Move X/Y axis into alignment area, and retry the operation. Reset error, machine will automatically reload the Vision system. Reset error, machine will automatically reload the Vision system. Check the software version, and reinstall correct software.

[0303]

[0304]

[0305]

System error 2 has occurred in Vision system.

[0306]

Alignment version is different from Main version.(Undefined command has been sent.) Alignment version is different from Main version.(Undefined response has been received.) Alignment version is different from Main version.(Undefined response has been received.)

[0307]

Check the software version, and reinstall correct software.

[0308]

Check the software version, and reinstall correct software.

7-11

 A-WD-200T

Chapter 7 Error Messages  

Code
[0309]

Contents
Alignment error.

Countermeasure
Check the alignment parameters, and retry. Check the shape recognition parameters, and retry. Registration of model data is required. Check the wafer thickness, and retry. and tape

[0310]

Shape recognition error.

[0311]

Model data is not registered.

[0312]

Auto-focusing error.

[0313]

Index size error.

Check the index size in wafer data. Change the environment setting, and retry. Register model data again using different image position. Adjust score setting, and retry. Adjust score setting, and retry. Retry the alignment. If error continues, Re-register models. Retry the alignment. If error continues, Re-register models. Readjust the rotation center and retry. There is a similar pattern, or the rotation center is shifted. Correct and retry. Register model data again.

[0314]

Contrast of image is not clear.

[0315]

Similar pattern has been found.

[0316] [0317] [0318]

Rough alignment error. Fine alignment error. Alignment closing process error.

[0319]

Alignment angle error.

[0320]

CH1 cross position is different from CH2 cross position. Positional relationship of target is not correct. the

[0321]

[0323]

Pattern matching score is too low. Kerf check image is not clear.

[0324]

Illumination or focusing is not correct. Adjust and retry. Adjust the illumination, and retry.

[0325]

Kerf check failure.

auto

brightness

7-12

 A-WD-200T

Chapter 7 Error Messages  

Code
[0326]

Contents
Check the kerf check result.

Countermeasure
Check the kerf check result, and start again. Check the kerf check result, and start again. Try again, after realigning. Create the data for Phase 1 or 2.

[0327]

Manual kerf check error.

[0328] [0329]

Manual alignment not completed. There is no phase data in wafer data. Kerf edge alignment error, model unrecognizable. Value of automatic edge(alignment) correction is too big to correct. Vision system HDD error

[0330]

Correct Kerf center manually and continue. Check the correction limit in wafer data.

[0331]

[0332]

Change the parameter of HHD for Vision system in system data to ON. Check the connection of HDD for Vision system and re-install, or replace the HDD. Re-format HDD for Vision system, or replace the HDD. Remove the wafer on the cutting table. Retry the alignment. If error continues, Re-register models. This wafer has already been cut. Please remove it. Check the wafer and thickness in wafer data. tape

[0333]

Connection error with HDD for Vision system.

[0334]

Access error in HDD for Vision system.,4 Matching error in recognition system. Alignment angle error. Shape

[0335]

[0336]

[0337]

Kerf was detected in un-cut wafer. Wafer thickness allowance is over limit. Plese re-register models.

[0338]

[0339]

Reload the model data, and retry the operation. Replace the blade.

[0400]

Complete blade breakage has been detected. Partial blade breakage has been detected.

[0401]

Replace the blade.

7-13

 A-WD-200T

Chapter 7 Error Messages  

Code
[0402]

Contents
Cutter-set signal has detected out of range. been

Countermeasure
Check the blade size or cutting table surface for water and retry. Clean the prism or check voltage on OPC control board. Adjust air blowing time. If this error recurs, adjust optical unit. Replace the blade.

[0403]

Optical cutter-set unit stand-by light level is too low Optic value is not stabilized. Cutter-set position has not be detected. Max. cut-line length has been exceeded. Permitted exceeded. Cutter-set performed. blade wear has

[0404] [0405]

[0406]

[0407]

Replace the blade.

[0408]

has

not

been

Perform the cutter-set.

[0409]

Automatic cutter-set correction result is over the limit. Automatic cutter-set correction result is over the limit(+). Blade exposure is improper for correct cutting conditions. Cutter-setting is required. Position data of Optical unit is not correct. Current blade data is not for reference flange. Cutter-set for new blade has not been done. Optical spot diameter is too large to detect blade edge. Optical spot diameter is too small to obtain uniform sampling data. Over-ride data setting in blade data is incorrect. This blade has not been used.

Check by manual cutter-setting.

[0410]

Check by manual cutter-setting.

[0411]

Replace the blade.

[0412] [0413]

Perform the cutter-set. Teach Optical unit position.

[0414]

Change the blade reference flange. Perform cutter-set replacement mode.

data

for

[0415]

in

blade

[0416]

Adjust the blade position in Y direction to center of the spot. Adjust the blade position in Y direction to center of the spot. Check the over-ride data in blade data. This blade can be used as new blade.

[0417]

[0418]

[0419]

7-14

 A-WD-200T

Chapter 7 Error Messages  

Code
[0420]

Contents
Current blade data name is different from the name of blade data which is registered in wafer data. Blade or flange diameter has been changed. Blade diameter exceeds the range allowed in the process. Cutter-set correction is over limit (+). Correction value is out of range.

Countermeasure
Change to the blade data chosen in wafer data.

[0421]

Perform a cutter-set.

[0422]

Check the blade diameter.

[0423]

Perform cutter-setting.

[0424]

Retry the caliblation of Optical cutter-set unit, or adjust mechanical position.

[0425] [0426]

Perform Z axis correction. Flange diameter is bigger than blade diameter. Table rotation angle in contact cutter-set is over limit. Check the blade diameter and flange diameter in blade data. Readjust X and Theta position of contact cutter-set by frame size conversion function. Check the result, and choose next operation. Execute blade replacement.

[0427]

[0428]

Cutter-setting completed.

has

been

[0429]

Z axis compensation has been completed. Offset value between contact and optical cutter-set does not exist. Over-ride setting can't be performed, because over-ride data does not existing. Y position of contact cutter-set is over the limit.

[0430]

Execute Contact and Optical cutter-set.

[0431]

Set the over-ride data correctly in blade data.

[0432]

Adjust contact cutter-set position in frame size conversion function. Readjust focus offset.

[0433]

Height of cutting table is different from previous one. Cutter-setting can't be performed, since the blade data is for reference blade. The blade data which was suspended does not exist in the HDD.

[0434]

Change the blade data.

[0435]

Register the identical blade data.

7-15

 A-WD-200T

Chapter 7 Error Messages  

Code
[0436]

Contents
Working data of previous blade is active. Blade data has been changed from the blade data which originally set in blade Maximum blade wear in blade data has exceeded Exposure in blade data. Compensation the limit. value exceeds

Countermeasure
Perform Blade end function.

[0437]

Set the blade data to correct data used in blade start function.

[0438]

Check the blade data.

[0439]

Perform Z axis compensation.

[0440]

Exposure has reached allowable limit.

Can continue with this blade, but blade replacement is recommended. Perform Z axis compensation.

[0441]

Easy compensation can not be used. Maximum blade wear is close to allowable limit. Current wear is as follows. Max. wear margin in blade data is not correct. Execute Contact cutter-set. and optical

[0442]

Can continue with this blade, but blade replacement is recommended. Check the blade data.

[0443]

[0444]

[0445]

Cutter-setting has been stopped by STOP switch. Cutter-set height result is higher than new blade cutter-set. Initial point of optical beam being blocked by blade could not be detected. End point of optical beam being blocked could not be detected . Half of the initial optic value was not detected. The spot diameter is smaller than allowable spot. Sample data for optical cutter-set is not adequate.

Execute cutter-setting manually.

[0446]

Perform prism air blow and retry cutter-setting. Adjust the blade position in Y direction to center of the spot.

[0447]

[0448]

Adjust the blade position in Y direction to center of the spot. Adjust the blade position in Y direction to center of the spot. Adjust the blade position in Y direction to center of the spot. If error continues, adjustment of optical cutter-set unit is required.

[0449]

[0450]

[0451]

7-16

 A-WD-200T

Chapter 7 Error Messages  

Code
[0452]

Contents
The result of optical cutter-set is out of range. Coolant water unstable. flow rate is

Countermeasure
If error continues, adjustment of optical cutter-set unit is required. Adjust flow rate and restart.

[0500]

[0501] [0502]

N2 pressure is not stable. Rinse water flow rate is unstable.

Adjust N2 pressure and restart. Adjust restart. washing water and

[0503]

Resistivity of CO2 bubbler is not stable. Resistivity of D.I. water is not stable. Internal machine temperature is not stable.

Adjust Bubbler and restart.

[0504]

Adjust Bubbler and restart.

[0505]

Adjust ambient temperature or check for fan or cooling failures and restart. Adjust water temperature and restart. Adjust water temperature and restart. Adjust vacuum unit and air piping. Adjust vacuum unit and air piping. Adjust Spindle unit and restart

[0506]

Coolant stable.

temperature

is

not

[0507]

Spindle coolant temperature is not stable. Inspect cutting table vacuum pressure. Inspect spinner table vacuum pressure. Spindle rotation speed is not stable. Blade cooling water 1 flow rate is not stable. Blade cooling water 2 flow rate is not stable. Spindle load current is over limit. Spinner table vacuum pressure is not stable.

[0508]

[0509]

[0510]

[0511]

Adjust blade cooling water valve and restart. Adjust blade cooling water valve and restart. Adjust Spindle unit and restart. Adjust Pressure unit and restart.

[0512]

[0513] [0514]

7-17

 A-WD-200T

Chapter 7 Error Messages  

Code
[0515]

Contents
Wafer vacuum pressure cutting table is not stable. Air pressure is not stable. Inspect air pressure. Inspect N2 pressure. Inspect internal temperature. Inspect coolant temperature. Inspect spindle temperature. coolant on

Countermeasure
Adjust Pressure unit and restart.

[0516] [0517] [0518] [0519] [0520] [0521]

Adjust Pressure unit and restart. Adjust Pressure unit and restart. Adjust Pressure unit and restart. Adjust room temperature. Adjust thermo-regulator. Adjust thermo-regulator.

[0522]

Inspect Blade cooling water 1 temperature. Inspect Blade cooling water 2 temperature. Inspect coolant flow rate. Inspect rinse water flow rate. Inspect resistivity of D.I. water. Inspect spindle load current.

Adjust valve of blade cooling water 1. Adjust valve of blade cooling water 2. Adjust valve of coolant. Adjust valve of rinse water. Adjust controller of Bubbler. Check cutting conditions and motor driver.

[0523]

[0524] [0525] [0526] [0527]

[0528]

Inspect bubbler. Cassette finished.

resistivity

of

CO2

Adjust controller of Bubbler.

[0600]

process

has

been

Prepare next cassette.

[0601] [0602]

Last wafer is processing. Wafer is present in Inspection tray.

Prepare next cassette. Remove the Inspection tray. wafer from

7-18

 A-WD-200T

Chapter 7 Error Messages  

Code
[0603] [0604]

Contents
No wafer exist in Inspection tray. Unload cassette is not present. (Cassette sensor: OFF) Catalog data does not exist for multi-device processing. Cassette base is out of position. Receiveing wafer(s) cassette contains

Countermeasure
Place a wafer in Inspection tray. Set the unload cassette.

[0605]

Set the Catalog file.

[0606] [0607]

Reset cassette. Use empty cassette for receiving cassette. Correct the base position.

[0608]

Inspection tray base is out of position. Dressing cassette is not present. This wafer can't be loaded to inspection tray. Two or more wafers exist on handling station. Wafer does not exist on Prealignment stage. Wafer is not present for revolving arm running mode execution. Processing present. cassette is not

[0609] [0610]

Set the dressing cassette. Assign the wafer which has END or UNLOAD status. Perform Revolving arm running mode using only one wafer. Check position of frame or return the wafer to the cassette. Set up a wafer for Revolving arm running. Set the processing cassette.

[0611]

[0612]

[0613]

[0616]

[0617] [0618] [0619] [0620]

Finished cassette is still present. Cassette 1(2) is not present. In idle status. Incorrect wafer position in the cassette. Forced cassette end. Wafer has been unloaded to Inspection tray.

Change the cassette. Set the processing cassette. Lock all cassette doors. Check the wafer position.

[0622] [0623]

Prepare next cassette. Remove the Inspection tray. wafer from

7-19

 A-WD-200T

Chapter 7 Error Messages  

Code
[0624] Inspection unloaded.

Contents
wafer has been

Countermeasure
Inspect the wafer, and unload to the cassette by Inspection check switch. Set the correct wafer data.

[0625]

Wafer data for dressing can not be selected. Dressing finished. cassette has been

[0626]

Prepare next dressing cassette.

[0627]

Unloaded wafer does not exist on Pre-alignment stage. Pre-load wafer sensor can not detect the wafer on Pre-load stage. Wafer has been loaded to Preload stage. Dressing wafer has been loaded to Inspection tray. Processing can't be performed due to Catalog data is not complete. Wafer can not be Pre-loaded. CST1 -> CST2 conveyance mode can not be used. Inspection wafer Inspection tray. exist in

Set the wafer on Pre-alignment stage, and restart. Adjust the sensor position and sensitivity.

[0628]

[0629]

[0630]

Select next operation.

[0631]

Set the Catalog data completely.

[0632] [0633]

Wait a moment. Check the System data setting.

[0634]

Unload the wafer to the cassette by Inspection check switch. Remove the wafer, and restart.

[0635]

Unloaded wafer does not exist on Pre-alignment stage. Wafer has been unloaded to Inspection tray. Wafer can't be detect on cutting table.(Vacuum error) Wafer can't be detected on spinner table.(Vacuum error) Machine is waiting for receipt of PC catalog information.

[0636]

Remove the Inspection tray.

wafer

from

[0637]

Press Reject function if you want to regard it as Lost. Press Reject function if you want to regard it as Lost.

[0638]

[0639]

7-20

 A-WD-200T

Chapter 7 Error Messages  

Code
[0670]

Contents
UV door can't move.

Countermeasure
Clear the obstruction, or adjust door sensor position. Check the wafer in UV unit. Clear the obstruction. Check the wafer alignment stage. on Pre-

[0671] [0672] [0673]

Wafer does not exist in UV unit. UV interference error. Wafer does not exist on Prealignment stage. UV lamp intensity error. Cooling fan for UV lamp is not working. UV unit is not set correctly. There is a Wafer present. There is a Wafer in UV unit. The UV unit door is open. It interfares with elevator motion. UV unit error.

[0674] [0675]

Check the UV lamps and sensor. Check the fan rotation cables of the sensor. Check the UV unit. Remove the Wafer, and retry. Remove the Wafer. Close the UV unit door. and

[0676] [0677] [0678] [0679]

[0680]

Check the error continue operation.

code

and

[0681]

Wafer cannot be put into UV unit.

Check the unit and remove the wafer. Check the unit. Check the unit and remove the wafer. Specify UV irradiation time in Wafer data. Check the N2 valve for UV unit.

[0682] [0683]

UV irradiation cannot be done. Wafer cannot be taken out of UV unit. UV irradiation specified. time is not

[0684]

[0690]

UV unit N2 flow error.

7-21

 A-WD-200T

Chapter 7 Error Messages  

Code
[0691]

Contents
Lamp unit cannot be moved.

Countermeasure
Check the movement and the sensor. Be advised it is time to replace the lamp. Be advised it is time to replace the lamp. Set a tray that suits the Work size. Set a tray that suits the Work size. Be advised it is time to replace the lamp. To execute cutting, cancel the cassette. To execute cassette. UV, cancel the

[0692]

UV light NG has been detected.

[0693]

Lamp operating time is over the set limit. No tray is set in the UV unit.

[0694]

[0695]

Size of the tray in the UV unit is not right. The number of lighting cycles has reached the specified limit. UV execution is specified.

[0696]

[0697]

[0698]

The cassette is specified for cutting. A Cassette processed. HDD I/O error. FDD I/O error. Following file was not found in HDD. Following file was not found in FDD. Following file was not found in HDD. Following file was not found in FDD. HDD is full. is being UV

[0699]

To cut a wafer, please cancel the cassette. Replace or format the disk. Replace or format the disk. Check file or HDD

[0700] [0701] [0702]

[0703]

Check file or FDD

[0704]

Set up HDD.

[0705]

Set up FDD.

[0706]

Delete unnecessary change HDD.

files

or

7-22

 A-WD-200T

Chapter 7 Error Messages  

Code
[0707] FDD is full.

Contents

Countermeasure
Delete unnecessary change FDD. files or

[0708] [0709] [0710] [0711] [0712] [0713] [0714]

HDD drive error. FDD drive error. The HDD is write-protected. The FDD is write-protected. The following file exist in HDD. The following file exist in FDD. Following file is not correct in HDD. Following file is not correct in FDD. Following directory can not be deleted in HDD. Following directory can not be deleted in FDD. The file was not found. The specified wafer data does not exist. Following disk isn't formated. The blade data does not exist. Data base file can't be opened.

Replace or format the disk. Replace or format the disk. Check the disk. Check the disk. Check the disk. Check the disk. Remake the file.

[0715]

Remake the file.

[0716]

Delete all data in the directory.

[0717]

Delete all data in the directory.

[0718] [0719]

Check the disk. Data recovery is required.

[0720] [0721] [0722]

Disk format is required. Data recovery is required. Perform data recovery of data base file.

7-23

 A-WD-200T

Chapter 7 Error Messages  

Code
[0723]

Contents
Data base file is not open.

Countermeasure
Perform data recovery of data base file. Specify correct condition, reinstall data base file. Specify correct condition. or

[0724]

Invalid search condition has been assigned in data base. The data which matches with search condition does not exist. Data base file does not exist. Syntax error of data base file. Data base file can't be executed. The parameter can't be edited.(wrong data or not found) Device data in TSKSRV directory is registered.

[0725]

[0726] [0727] [0728] [0729]

Install the data base file. Install the data base file. Install the data base file. Verify parameter file and reexecute. When this process is interrupted by EMG, etc, Data recovery is required.

[0730]

[0731] [0732] [0733] [0734] [0735] [0736] [0737]

Schematic

file can't be opened. Press any key to continue. Press any key to continue. Press any key to continue. Press any key to continue. Press any key to continue. Execute install?(ENT/ESC Execute/Cancel) =

This is PMS HELP. This is PMSS HELP. This is PMSS HELP. This is PMSS HELP. This is PMSS HELP. Insert Floppy disk of ADB to FDD. Save ADB for PMSS to FDD. Caution several FD may be required. Specific floppy disk required to save ADB file. Cannot be present. installed; DB is

[0738]

Insert Floppy disk in FDD. Save to floppy disk? (ENT/ESC = Execute/Cancel) Insert specified floppy disk and press any key to continue. Confirm using each monitor functions, and execute [DB-INIT].

[0739]

[0740]

7-24

 A-WD-200T

Chapter 7 Error Messages  

Code
[0741]

Contents
ADB is saved on FD. (For amount, refer to followings) Initialize all PMS data.

Countermeasure
Press any key.

[0742]

Press ENT to Execute. ESC to quit. Check disk drive. Check the file or disk drive. Change the disk or delete some files. Check the disk. Check the disk. Initialize Machine.

[0750] [0751] [0752]

I/O error. There is no file. Disk is full.

[0753] [0754] [0800]

No floppy disk or write prptected. The file is alredy existed. Vision system handshake error with Main CPU. Vision system program access error.

[0801]

Initialize Machine. If error continues, reinstall the system program. Initialize Machine. If error continues, reinstall the system program. Initialize Machine. If error continues, reinstall the system program. Initialize Machine. If error continues, contact TSK service. Initialize Machine. If error continues, contact TSK service. Main software reinstallation is required. Initialize Machine. If error continues, reinstall the system program.

[0802]

Vision system initialize error.

[0803]

Vision system halted.

[0804]

Sending time-out error to Vision system. Receiving time-out error from Vision system. Receiving data length error.

[0805]

[0806]

[0807]

Vision system start-up failure.

7-25

 A-WD-200T

Chapter 7 Error Messages  

Code
[0810]

Contents
Vision system has not loaded.

Countermeasure
Initialize Machine. If error continues, contact TSK service. Initialize Machine. If error continues, contact TSK service. Check Vision system. If repeating, contact TSK service. Reinstall, if it is not released by power on/off. Request installation file from Vender. Correction of communication parameters is required. Analyze Host message Protocol and correct it. Correct Host Communications specification or VID. Define if necessary.

[0811]

Vision system error.

[0812]

Vision system not connection.

[0850]

System error occurs under communication specification. Installation file isn't correct.

[0851]

[0852]

SECS communication error.

[0853]

Host communication error

[0854]

VID Host selected is not handled.

[0855]

Alarm code selected is undefined under communications spec. Communications establishementis not made. Load start is not permitted by Host. Stopped by instruction. Host Abort

[0856]

Establish communications.

[0857]

Have Host give permission.

[0858]

Continue by <START>SW.

[0859] [0860] [0861]

No PPID designation from Host. Sequence is disabled by Host. Have Host give permission.

Have Host give instruction. Have Host give permission. Switch Dicer to OFFLINE mode or DISABLE and restart in ONLINE mode.

7-26

 A-WD-200T

Chapter 7 Error Messages  

Code
[0862]

Contents
Cannot switch to ONLINE mode because host is set in OFFLINE mode. Device name not sent by Host.

Countermeasure
Switch host to ONLINE mode first or restart with Dicer in OFFLINE mode. Confirm host again or operate manually in single LOT-START. Select LOT-END.

[0863]

[0864]

No. of wafers specified by Host processed. Following file will be over-written. Waiting for wafer from external handling station. External working. handling station is

[0900] [0901]

Wait a moment.

[0902]

Wait a moment.

[0903]

RS232C communication ports are not initialized. RS232C data send time-out.

Turn off the machine and start up again. Check parameter and RS232C communication hardware. Check parameter and RS232C communication hardware. Check bar-code sheet and barcode specification. Check bar-code sheet and barcode specification. Check parameter and RS232C hardware. Check parameter and RS232C hardware. Check parameter and RS232C hardware. Check the wafer data name.

[0904]

[0905]

RS232C data received time-out.

[0906]

Bar-code data reading time out error. Wrong character was received while reading bar-code. RS232C parity error.

[0907]

[0908]

[0909]

RS232C over-run error.

[0910]

RS232C framing error.

[0911]

The wafer data which is assigned is not existing. Bar-code can't be read.

[0912]

Confirm bar code sheet and/or bar code reader and restart.

7-27

 A-WD-200T

Chapter 7 Error Messages  

Code
[0913]

Contents
Error form BL500. bar-code reader

Countermeasure
Turn-off the machine, and start up again. Press any key to continue. Press any key to continue. Remove wafer after turned off. vacuum

[0914] [0915] [0916]

Mount a wafer on cutting table. Mount a wafer on spinner table. Press any vacuum. key to turn off

[0917] [0918] [0919]

Good vacuum achieved. Vacuum failure. Incorrect frame size was set.

Press any key to continue. Press any key to continue. Check and set correct frame size data. Wait for a while.

[0920] [0921] [0999]

Executing spinner washing... System debug only. This machine guaranteed by software. can't be this system

Contact the Vendor.

[90000]

Custom file for display does not exist. Version of custom file does not match the version of Main software.

Install necessary file(s), and setup again. Install necessary file(s), and setup again.

[90001]

7-28

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